Development of a Multi Channel Piezoelectric Flexural Plate Wave Biomems-Sensor for Rapid Point-of-Care Diagnostics

Wiemann, Matthias; Walk, Christian; Greifendorf, Dieter; Weidenmueller, Jens; Jupe, Andreas; Seidl, Karsten

doi:10.1109/transducers.2019.8808277

Cited by 4 publications

(7 citation statements)

References 5 publications

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“…For the specific detection of target molecules such as chemokines, capture molecules are immobilized on the backside of the Bio-MEMS FPW-sensor membrane [5]. The Bio-MEMS FPW-sensor is mounted onto a microfluidic carrier which allows a liquid to flow from the input connection (fluidic input) passing over eight Bio-MEMS FPW-sensors integrated on a single chip to two exhaust [6]. A liquid of Tris buffer was continuously pumped along the sensor using a syringe pump.…”

Section: Results Of Functionalized Bio-mems Fpw-sensormentioning

confidence: 99%

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A Piezoelectric Flexural Plate Wave (FPW) Bio-MEMS Sensor with Improved Molecular Mass Detection for Point-of-Care Diagnostics

Walk

Wiemann

Görtz

et al. 2019

Current Directions in Biomedical Engineering

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A piezoelectric FPW-sensor has been developed for a point of care device in this work. The Bio- MEMS FPW-sensor consists of an electrode configuration termed as an interdigital transducer (IDT) placed on a membrane. An input IDT excites and an output IDT detects the propagating acoustic waves through a PZT layer. Design optimizations and fabrication improvements of the FPW-sensor led to significantly reduced attenuation of the wave signal and the damping of the propagating waves between the IDTs. The working principle of mass loading is shown using different low-viscous liquids. A densitydependent sensitivity of -0.39 MHz/g/cm³ was evaluated. After the membrane was functionalized, the Bio-MEMS FPW-sensor was used to measure a specific chemokine in complex solution. By design improvements, the resolution was significantly increased from 0.7 Hz/nM to 14 Hz/nM.

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Section: Results Of Functionalized Bio-mems Fpw-sensormentioning

confidence: 99%

“…In this spectrum the most prominent resonance peak is identified by the NWA. The resonance frequency is monitored over time to detect any frequency shifts [6].…”

Section: Sensor Layout and Fabricationmentioning

confidence: 99%

A Piezoelectric Flexural Plate Wave (FPW) Bio-MEMS Sensor with Improved Molecular Mass Detection for Point-of-Care Diagnostics

Walk

Wiemann

Görtz

et al. 2019

Current Directions in Biomedical Engineering

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“…The majority of these function through the use of acoustic waves generated in a piezoelectric crystal [ 109 ]. As an analyte attaches to the surface, the frequency of the acoustic waves will decrease in response to the additional mass, in accordance with the Sauerbrey equation [ 110 ]. These acoustic wave sensors may be used for the detection of heavy metal ions such as Pb2+ [ 111 ], proteins [ 112 ], complex biological molecules [ 113 ].…”

Section: Mechanical Biosensorsmentioning

confidence: 93%

Biosensors Based on Mechanical and Electrical Detection Techniques

Chalklen

Jing

Kar‐Narayan

2020

Sensors

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Biosensors are powerful analytical tools for biology and biomedicine, with applications ranging from drug discovery to medical diagnostics, food safety, and agricultural and environmental monitoring. Typically, biological recognition receptors, such as enzymes, antibodies, and nucleic acids, are immobilized on a surface, and used to interact with one or more specific analytes to produce a physical or chemical change, which can be captured and converted to an optical or electrical signal by a transducer. However, many existing biosensing methods rely on chemical, electrochemical and optical methods of identification and detection of specific targets, and are often: complex, expensive, time consuming, suffer from a lack of portability, or may require centralised testing by qualified personnel. Given the general dependence of most optical and electrochemical techniques on labelling molecules, this review will instead focus on mechanical and electrical detection techniques that can provide information on a broad range of species without the requirement of labelling. These techniques are often able to provide data in real time, with good temporal sensitivity. This review will cover the advances in the development of mechanical and electrical biosensors, highlighting the challenges and opportunities therein.

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“…where v is the velocity of the SAW on the chosen piezoelectric substrate and p is the pitch of IDT. SAW devices can be designed to operate between 10 MHz to 2.5 GHz on piezoelectric substrates, such as quartz, LiTaO 3 , and LiNbO 3, and thin films, such as AlN, PZT, and ZnO [56,[210][211][212][213][214][215][216]. This operating frequency is almost more than 100 times higher than that of bulk waves in QCM.…”

Section: Surface Acoustic Wave Biosensorsmentioning

confidence: 99%

“…These modes are also termed as flexural plate wave modes (FPW) [236]. FPW devices are generally realized by using very thin film piezoelectric films, such as ZnO, AlN, and PZT, forming membranelike devices with the thickness of the plate being only a small percentage of the acoustic wavelength [212,216,246,247]. Even though the particle displacements for the FPW mode have surface normal components, they are suitable for sensing in the liquid medium, given that their wave velocity is much lower than the compressional velocity in the liquid medium.…”

Section: Saw Modes For Biosensorsmentioning

confidence: 99%

Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications

Nair

Teo

2021

Micromachines

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Lab-on-a-chip (LOC) technology has gained primary attention in the past decade, where label-free biosensors and microfluidic actuation platforms are integrated to realize such LOC devices. Among the multitude of technologies that enables the successful integration of these two features, the piezoelectric acoustic wave method is best suited for handling biological samples due to biocompatibility, label-free and non-invasive properties. In this review paper, we present a study on the use of acoustic waves generated by piezoelectric materials in the area of label-free biosensors and microfluidic actuation towards the realization of LOC and POC devices. The categorization of acoustic wave technology into the bulk acoustic wave and surface acoustic wave has been considered with the inclusion of biological sample sensing and manipulation applications. This paper presents an approach with a comprehensive study on the fundamental operating principles of acoustic waves in biosensing and microfluidic actuation, acoustic wave modes suitable for sensing and actuation, piezoelectric materials used for acoustic wave generation, fabrication methods, and challenges in the use of acoustic wave modes in biosensing. Recent developments in the past decade, in various sensing potentialities of acoustic waves in a myriad of applications, including sensing of proteins, disease biomarkers, DNA, pathogenic microorganisms, acoustofluidic manipulation, and the sorting of biological samples such as cells, have been given primary focus. An insight into the future perspectives of real-time, label-free, and portable LOC devices utilizing acoustic waves is also presented. The developments in the field of thin-film piezoelectric materials, with the possibility of integrating sensing and actuation on a single platform utilizing the reversible property of smart piezoelectric materials, provide a step forward in the realization of monolithic integrated LOC and POC devices. Finally, the present paper highlights the key benefits and challenges in terms of commercialization, in the field of acoustic wave-based biosensors and actuation platforms.

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Development of a Multi Channel Piezoelectric Flexural Plate Wave Biomems-Sensor for Rapid Point-of-Care Diagnostics

Cited by 4 publications

References 5 publications

A Piezoelectric Flexural Plate Wave (FPW) Bio-MEMS Sensor with Improved Molecular Mass Detection for Point-of-Care Diagnostics

A Piezoelectric Flexural Plate Wave (FPW) Bio-MEMS Sensor with Improved Molecular Mass Detection for Point-of-Care Diagnostics

Biosensors Based on Mechanical and Electrical Detection Techniques

Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications

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