2021
DOI: 10.17485/ijst/v14i21.541
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Development of a Novel three degree of freedom XYθZ Micro-Motion Stage

Abstract: Background:The piezoelectric motion with multi-degree of freedom is gaining attention in industries for modern manufacturing. High degree of positioning accuracy is obtained by complaint micro machining stages which involves high cost. A variety of stages of multi-degree motion freedom are proposed and applied for decades which can perform very high precision outputs in a wide travel range. Methodology: This paper mainly focuses on design, development and analysis of the 3 DOF (Degree of Freedom) XYq Z micro-m… Show more

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