Development of a platinum resistance thermometer on the silicon substrate for phase change studies

Abstract

Resistance temperature detectors are commonly used measurement sensors in heat transfer studies. In many resistance temperature detectors, the platinum resistance thermometer (PRT) is chemically stable, has a wide temperature measurement range and possesses high measurement accuracy. In phase change studies of carbon nanotubes, bi-porous structures for microelectronic thermal management, 100 nm thick PRTs are developed on silicon substrates with 10 nm titanium adhesive to achieve precise and interface-free temperature measurements. After an annealing at 375 • C, the PRT samples are calibrated at a temperature range from 20 to 180 • C. Measurement hysteresis of temperature appears in thermal cycles. Electrical resistance tends to become low during all heating periods, which establishes the maximum measurement deviation of 10 • C. Experimental results from two different thin-film PRTs indicate that accurate and repeatable temperature measurements can be achieved by either reducing heating speed or using data in the cooling period.

Design, fabrication and test of an integrated multi-microchannel heat sink for electronics cooling

“…14a) and always recover the initial value after each cycle and (ii) temperatures measured by the Ru sensors (Fig. 14b) show lower values during the heating half of the cycle which has been observed to be associated with thermal inertia, rather than with the differential expansion between the thin film and the silicon substrate as reported by Cai et al [26] for thin film platinum resistance thermometer. Additionally, both, the Ru and Al layers remain with good adhesion to the silicon substrate and no electrical resistance floating is observed at room temperature after several thermal cycles.…”

A review on various temperature-indication methods for Li-ion batteries

“…However, unlike thermistors, platinum RTD show a linear behaviour, which makes these very convenient for use in an application. Other advantages of platinum RTD are the excellent stability, accuracy (approaching 1 mK, but ±0.01 o C to ±0.2 o C in industrial applications), and wide operating range (-260 to 960 o C) [197]. RTD can be offered as inner-coiled, outer-wound, or thin-film device.…”

MEMS Non-Magnetic Electric Heating Chip for Spin-Exchange-Relaxation-Free (SERF) Magnetometer

“…Moreover, platinum has a high temperature coefficient of resistance (TCR), which means higher sensitivity to temperature with the same resistance. The resistivity is linearly related to the temperature within a large range of −200 • C -1200 • C, which contributes to a more accurate temperature measurement [17], [18]. Therefore, Pt is selected as the material of the resistor.…”