Development of a transportable apparatus for vacuum gauge calibration

Xi, Zhenhua; Cheng, Yongjun; Wang, Yongjun; Zhang, Huzhong; Jiatong, Liu; Guan, Baoguo; Ji, Kang

doi:10.1016/j.vacuum.2016.01.025

Cited by 2 publications

(2 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…If no historical data is available it is not possible to answer the question [14]. In addition, users have to stop their manufacturing process for at least several weeks during the period of calibration [6]. This is inappropriate in manufacturing conditions.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Vacuum Gauge Verification Methodology for Vacuum Coating Deposition Processes

Štekleins¹,

Geriņš²,

Kromanis³

2017

DAAAM Proceedings

View full text Add to dashboard Cite

The paper analyses vacuum gauge accuracy problem, which leads to the pressure deviation in vacuum nano-coating deposition process. Pressure deviation leaves significant impact on vacuum coating properties and quality. Therefore, new vacuum gauge verification methodology has been developed and the results are presented in this paper. Methodology consists of combination of several verification methods, including a method of constant pumping speed, method of comparison to the reference gauge, Student's t-distribution and other methods and approaches. In the following research, several experiments with ionization and diaphragm vacuum gauges were performed to obtain data on their accuracy and to validate thereof. Proposed methodology focuses on vacuum gauge multifunctional verification under manufacturing conditions, resulting in correction coefficient implementation for vacuum gauges. Developed methodology determines a necessity and a period of calibration to be needed for each vacuum gauge

show abstract

Section: Introductionmentioning

confidence: 99%

“…This is inappropriate in manufacturing conditions. Moreover, some users are worried about the damage of their vacuum gauge during transportation [6]. Vacuum gauge calibration decision must be made as final step based on reliable information.…”

Section: Introductionmentioning

confidence: 99%