Development of a unimorph deformable mirror with water cooling

Abstract

Deformable mirror (DM) used for intracavity compensation in high-power lasers should be able to withstand very high laser intensity. This paper proposes a water-cooled unimorph DM which can withstand the laser power up to 10 kW in thermal simulation. The proposed DM consists of an annular PZT layer and a circular Si layer which are glued together with edge clamped. All the 32 piezoelectric actuators are distributed around the correction area and on the front side of the DM. The cooling water flows through the back side of the DM and cools the mirror directly. This design realizes the physical separation of the actuators and the coolant. The experimental results of a fabricated DM prototype show that the DM can reproduce typical low-order aberrations accurately with relatively large amplitude. The wavefront PV amplitudes of the reproduced tip/tilt, astigmatism, defocus, trefoil and coma shapes for 15 mm aperture are about 40 μm, 24 μm, 18.7 μm, 10 μm and 6 μm, respectively.

Wavefront control with high-spatial cartridge-type piezostack deformable mirror

“…They are divided into devices with a continuous [15] and segmented [16] reflective surface. According to the principle of operation, they can be divided into: mechanical [17] , membrane [18], MEMS [19] , magnetostrictive [20] , thermally deformable [21] , piezostack [22][23][24][25] , bimorph [26][27][28][29][30][31][32][33] , combined mirrors (using several technologies simultaneously) [34,35] , as well as liquid crystal light modulators [36] , devices with a matrix of micromirrors (DMD technology) [37] or simple tip-tilt stages [38][39][40][41] . Every part of the correction system (wavefront sensor, wavefront corrector, control unit) impact on the error budget of the system [42][43][44] .…”

Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design

“…In the manufacturing of the piezoelectric deformable mirrors, solid solutions based on lead zirconate titanate (PZT) are used as a material for creating control elements due to their high electrical properties (piezoceramic coefficients d 31 , d 33 ), dielectric loss tangent, and blocking force [58][59][60]. Piezoceramic coefficients correspond to the deformable mirror stroke for compensation of the wavefront aberrations with the large amplitude.…”

Deformable piezoelectric mirrors with high density of control elements

“…Piezoelectric deformable devices are ones of the most used wavefront correctors in many scientific researches [1][2][3][4][5][6][7][8][9][10] : freespace communications [11] , high-power laser operation [12] , ground-based astronomy [13,14] . Such mirrors could be divided on two categories: bimorph [15,16] and piezostack [17][18][19][20] .…”