Development of an integrated CMOS DNA detection biochip

A Label-free CMOS DNA Microarray based on Charge Sensing

“…The passivation layer used to encapsulate the die covers the electrodes (only removed from the bondpads). Unlike previous work [2][3][4], our sensors do not require additional post-processing to obtain gold electrodes or GMR structures on the surface of our die. To attach DNA probes, a thin polymer layer is applied on top of the die passivation and singlestranded DNA probes are placed above each electrode by spotting.…”

“…Researchers have been exploring various electronic DNA sensing techniques targeted to point-ofcare medical diagnostics because they can be manufactured in high volumes at low-cost. These electrical-based techniques have sensed DNA hybridization by measuring a change in surface impedance [2,8], surface charge using field-effect devices [1,7], current from redox-cycling above an electrode [3], conductivity between two electrodes [4,6], or conductivity of a giant magnetoresistance (GMR) spin valve in the presence of a magnetic nano-particle [5].…”

A novel CMOS sensor for measuring thermal diffusivity of liquids

“…Some parts of the silicon substrate are exposed to the air after SiO 2 layer is removed by the RIE process. The common anisotropic wet etching solution for silicon is TMAH, which is also compatible with CMOS process [10][11][12]. In this study, we used 8 wt.% TMAH solution at 80 • C for 4 h to remove silicon.…”

Novel portable electrical detection system for DNA SENSOR application

“…For this reason, the current research trends focus on systems that do not use molecular labels and have fast DNA hybridisation detection, which are easy to use and portable. For example, Cheng et al [11] presented a DNA detection system that includes a DNA biosensor, a current amplifier circuit for DNA identification via electrical detection; the lowest detectable concentration of the DNA target on this device is 0.1 nM. The development of a highsensibility DNA biosensor based on a 50 MHz quartz crystal microbalance (QCM) oscillator electronic circuit was reported by Bustabad et al [9].…”