2008 IEEE Instrumentation and Measurement Technology Conference 2008
DOI: 10.1109/imtc.2008.4547305
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A Label-free CMOS DNA Microarray based on Charge Sensing

Abstract: -The first label-free CMOS

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Cited by 10 publications
(8 citation statements)
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“…Yet another approach functions both as a hybridization and polymerization sensor, and could therefore be used to sequence DNA [140]. Probe DNA is immobilized over a polymer layer by spotting, and target DNA of a different length is then introduced.…”
Section: Biochemical Sensorsmentioning
confidence: 99%
“…Yet another approach functions both as a hybridization and polymerization sensor, and could therefore be used to sequence DNA [140]. Probe DNA is immobilized over a polymer layer by spotting, and target DNA of a different length is then introduced.…”
Section: Biochemical Sensorsmentioning
confidence: 99%
“…As opposed to ISFET's, which measure the charge of DNA molecules indirectly, direct charge sensing, usually implemented by induction on capacitive electrodes, is used as well. Sensitivity levels as 2203 e − [40], 100 pM [41] and 10 −14 C (which is roughly 60000 e − ) [42] are reported with this technique. This paper reports a novel CMOS sensor chip utilizing direct charge sensing technique [43] with improved sensitivity compared to its counterparts.…”
Section: Introductionmentioning
confidence: 65%
“…This distance is determined by the thickness of nitride passivation layer and APTES, which are about 1 μm and 20 nm [45], [46] respectively. The overall charge Q induced on the surface by a charge q can be calculated as in (1), for given detector width (w = 7 μm) and separation distance (d = 1 μm) [40].…”
Section: Introductionmentioning
confidence: 99%
“…The biomolecules are shown to be captured on the top metal layer (marked as TM2) of the back-end-of-line (BEOL) stack of the CMOS process. Complete CMOS biosensors or biochips have then been explored by researchers for various applications, like DNA characterization [ 50 , 51 , 52 ], detection of biomarkers [ 53 ], and cytometric application [ 54 , 55 , 56 ]. The next step is the monolithic integration of microwave sensor architecture on the CMOS/BiCMOS platform.…”
Section: Integrated Microwave Biosensormentioning
confidence: 99%