Development of an ultra precision machine tool for micromachining on large surfaces

Park, Chun Hong; Song, Chang Kyu; Hwang, Junseok; Kim, Byungsub

doi:10.1007/s12541-009-0075-3

Cited by 35 publications

(19 citation statements)

References 4 publications

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“…The carrying capacity and stiffness of hydrostatic guide-way will be weak because of the chamber's pressure p by the width of oil seal edge. The pressure p can be increased by increasing liquid resistance of hydrostatic guide-way from equation (1). It is inferred that the performance of hydrostatic guide-way can be improved through increasing liquid resistance.…”

Section: The Factors Of Influencing the Carrying Capacity And Stiffnementioning

confidence: 99%

“…Hydrostatic guide-way, as an important supporting component for CNC machine tool, are widely used in large, heavy-duty and super precision machining equipment [1] because of its advantages such as good bearing capacity, proper stiffness, better absorption vibration performance and so on. How to improve the oil film stiffness of hydrostatic guide-way is becoming the main problem to improve the machining accuracy of machine tool, for which the fluctuation of oil film thickness from the change of load will affect it during application process.…”

Section: Introductionmentioning

confidence: 99%

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Research on a New Method for Improving the Mechanical Properties of Hydrostatic Guide-way

Shi¹,

Guo²,

Huang³

2017

dtetr

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Abstract. Guide-way is the most important part for ultra-precision CNC machine tool. Its carrying capacity and stiffness are important performance parameters for it. Hydrostatic guide-way is used on CNC machine tools because of its advantages. In order to meet the requirements of ultra-precision CNC machine tool for precision and high speed, a new type hydrostatic guide-way with high liquid resistance is put forward. The simulation has been done how the position, width and depth of the ring on oil seal edge of the new hydrostatic guide-way effect on the oil chamber pressure. It is verified from the simulation that the chamber's pressure of the hydrostatic guide-way can be enhanced significantly if the position, width and depth of the ring are appropriate. It is reasoned that the carrying capacity and stiffness of the hydrostatic guide-way are improved when a ring is set on its oil seal edge. The conclusion can be got that the new type hydrostatic guide-way has a better carrying capacity and stiffness because of the ring set on the oil seal edge if its position, width and depth are appropriate.

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Section: The Factors Of Influencing the Carrying Capacity And Stiffnementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Research on a New Method for Improving the Mechanical Properties of Hydrostatic Guide-way

Shi¹,

Guo²,

Huang³

2017

dtetr

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“…Ultra-precision machine tools have various applications in manufacturing some components with optical quality surfaces, microstructured surfaces or free-form surfaces [1][2][3]. Ultra-precision drum lathes play an important role in machining large-scale microstructured drum molds [4][5][6] which are widely used in roll-to-roll process for mass production of TFT panel films and antireflective polymer optical film etc.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of aerostatic spindle with high load characteristics for large ultra-precision drum lathe

Wang

Luo

et al. 2015

Proceedings of the Institution of Mechanical Engineers, Part J:

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Aerostatic spindles offer low heat generation and high rotation accuracy which make them an ideal choice for ultra-precision drum lathe where extremely high motional accuracy and thermal stability are required. However, the limitations such as insufficient load capacity and stiffness have restricted their permissible application range and make them not suitable for large ultra-precision machine tools including drum lathe. In order to improve the load capacity and stiffness, this paper presents a high load capacity aerostatic spindle with pocketed orifice-type restrictors. Fluent is adopted and three-dimensional simulation models of aerostatic spindle with orifice and feeding pocket are set up to analyse the load characteristics. The simulation results show that this restrictor can enhance the throttling effect of orifice and suppress the pressure drop away from the orifice. Moreover, for aerostatic journal bearing, when eccentricity ratio is in the range of 0.2-0.3 and gas supply pressure is 0.6 MPa, carrying capacity and stiffness can reach up to 9499.4 N and 2813.1 N/μm. Finally, a group of loading experiments are carried out which prove that the novel three-dimensional simulation method is feasible and accurate to calculate the load characteristics of aerostatic spindles.

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“…1 With remarkable progress in optical technology, the dimensions of the micro-structures are getting smaller, the shapes are getting more complicated, the areas are getting larger and the required accuracies are getting higher. 2 Diamond turning is an important machining technology for precision surface forms. The accurate tool path generated by the stable and rigid slides 3 and spindle of the diamond turning machine as well as the good cutting performance of the single point diamond cutting tool makes the machined surface to have a good form accuracy and a high surface quality.…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures

Lee

Noh

Gao

et al. 2011

Int. J. Precis. Eng. Manuf.

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This paper presents the experimental results of investigating the performances of an air-bearing displacement sensor for surface form measurement of micro-structures, such as micro-lenses, on an ultra-precision machine tool. The sensor consists of a stylus for contacting the surface, a shaft for mounting the stylus, an air-bearing for suspending the shaft and a blade spring for applying the measuring force against the surface. At first, experiments were conducted on a vibration isolated table to identify the basic performance of the sensor for displacement measurement. Then, the sensor was mounted on a diamond turning machine for evaluating the performance of the sensor for on-machine surface form measurement of micro-lenses. A roll workpiece, on which a micro-lens array was fabricated by using a fast tool servo on the diamond turning machine, was employed as the specimen for the on-machine experiment of surface profile measurement.

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Development of an ultra precision machine tool for micromachining on large surfaces

Cited by 35 publications

References 4 publications

Research on a New Method for Improving the Mechanical Properties of Hydrostatic Guide-way

Research on a New Method for Improving the Mechanical Properties of Hydrostatic Guide-way

Design and analysis of aerostatic spindle with high load characteristics for large ultra-precision drum lathe

Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures

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