Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures

Lee, Kang Won; Noh, Young Jin; Gao, Wei; Arai, Yoshikazu; Shimizu, Yuki; Tanaka, Katsutoshi; Fukuta, Masahiko; Kai, Yoshiaki

doi:10.1007/s12541-011-0087-7

Cited by 19 publications

(8 citation statements)

References 18 publications

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“…In order to observe the machined surface without removing it from the machine, several contact and non-contact methods have been tried. Lee et al [6] developed a contact air-bearing displacement microball for the in situ line profile measurement of micro-structures. Kim et al [7] fabricated the saddle surface and could measure the surface radius by placing the stylus probe on the machine to scan along the radial direction.…”

Section: Introductionmentioning

confidence: 99%

Scanning tunneling microscopy-basedin situmeasurement of fast tool servo-assisted diamond turning micro-structures

Ju¹,

Zhu²,

Yang³

et al. 2014

Meas. Sci. Technol.

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We propose a new in situ measurement system based on scanning tunneling microscopy (STM) to realize spiral scanning of a micro-structure without removing it after fast tool servo (FTS) cutting. To avoid distortion of the machined and measured surface, the center alignment of the FTS tool and the STM tip was first implemented by an STM in situ raster scan of two circular grooves cut by the machine tool. To originally observe the machined surface, the trace of the STM tip is put in accord with that of the FTS by setting the same start and end points of cutting and scanning and the same feed rate, and both are triggered by the subdivided rotary encoder of the spindle of the diamond turning machine. The profile data of the in situ spiral scanning of the machined micro-lens array can be fed back to compensate the depth of the cut to guarantee sub-micron form accuracy after second machining. The efficient spiral scanning, proper matching and accurate evaluation results demonstrate that the proposed STM in situ measurement approach is of great significance to the fabrication process.

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Section: Introductionmentioning

confidence: 99%

Scanning tunneling microscopy-basedin situmeasurement of fast tool servo-assisted diamond turning micro-structures

Ju¹,

Zhu²,

Yang³

et al. 2014

Meas. Sci. Technol.

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“…21 shows an air bearing probe for alignment of a remounted workpiece [259]. The low viscosity of the air bearing reduces the anti-vibration performance of the probe as well as the scan speed, especially for on-machine measurement of microstructures [141]. Some commercially available on-machine air bearing probes are listed in Table 4.…”

Section: Contact-type Probesmentioning

confidence: 99%

On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed.

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“…The parameters of the stylus-based probing system and the measurement setup affect the dynamic performance (e.g., fidelity, measuring force, and dynamic errors), which were analysed by numerical simulations based on the kinematical model expressed by (1). In the numerical simulations, the parameters of a practical stylus-based probing system were employed and given as = 3.5 g, = 2.7 N/m, and = 0.00144 Nsm −1 [19]. A sine-shaped microstructure expressed by (16) with amplitude of 200 m and period of 100 m was used as the measurement specimen.…”

Section: Effect Of Measurement Setup On Dynamic Performancementioning

confidence: 99%

A Method to Control Dynamic Errors of the Stylus-Based Probing System for the Surface Form Measurement of Microstructures

Fang

Yin

et al. 2016

Journal of Nanomaterials

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Dynamic errors of the stylus-based probing system seriously affect the measurement accuracy in surface quality detection on microstructures. A method, which is focused on measuring the surface form of microgears, microholes on the injector nozzle, and so forth, is proposed to control dynamic errors of the stylus-based probing system. Firstly, two kinematical models were built to systematically investigate the dynamic performance of the stylus-based probing system, and the relationship between the measuring force, scanning speed, fidelity, and dynamic errors was described. Then, numerical simulations of the surface form measurement, in which a sine-shaped microstructure was taken as a target surface, were carried out. Results of the numerical simulations reveal that the dynamic errors were affected by the scanning speed and the initial position of the measured specimen. Lastly, a method to control dynamic errors by properly setting up the scanning speed and the initial position of the specimen was proposed for the surface form measurement of microstructures.

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Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures

Cited by 19 publications

References 18 publications

Scanning tunneling microscopy-basedin situmeasurement of fast tool servo-assisted diamond turning micro-structures

Scanning tunneling microscopy-basedin situmeasurement of fast tool servo-assisted diamond turning micro-structures

On-machine and in-process surface metrology for precision manufacturing

A Method to Control Dynamic Errors of the Stylus-Based Probing System for the Surface Form Measurement of Microstructures

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