Scanning tunneling microscopy-based in situ measurement of fast tool servo-assisted diamond turning micro-structures

In this paper, we present a novel geometry information-based adaptive step (non-equidistance) scanning path generation method for metrological scanning probe microscopes. This method reduces the total amount of required data and enables faster surface scanning speed for large industrial workpieces while preserving adequate geometric information for performance evaluation after surface reconstruction. The grid points are generated iteratively while gaining knowledge of the surface geometry step by step. We focus on the curvature properties and then propose a metric for the curvature information based on the triangulated surface geometry. With certain convergence criteria on the curvature measure variation, the proposed methods promise better surface reconstruction completeness and performance evaluation correctness. Simulations on the algorithm are performed on a typical parametric surface. A brief comparison to height-based scanning algorithm is performed to show the adaptability of the novel method on curvature evaluation. Experimental verifications are conducted to show the efficiency of the proposed algorithm.

Section: Experiments Setupmentioning

confidence: 99%

“…With the capability of integration with positioning sensors (e.g. interferometers [1]), SPMs are not only widely used as quantitative tools in various fields of scientific research, but they are also developing rapidly for manufacturing and industrial applications, especially for the surface evaluation of microstructures [2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Non-equidistant scanning path generation for the evaluation of surface curvature in metrological scanning probe microscopes

2021

“…A new centering method of the measuring probe for spiral scanning-based surface profile measurement systems centre of rotation of the spindle, which is the most important priority for realization of the spiral scanning, is always a difficult and time-consuming process [14]. An AFM based spiral scanning measurement system has been developed for surface profile measurement on a diamond turning machine [15].…”

Section: Measurement Science and Technologymentioning

confidence: 99%

A new centering method of the measuring probe for spiral scanning-based surface profile measurement systems

Zeng

et al. 2016

Spiral scanning is a high-efficiency scanning mode for surface profile measurement systems. The most important priority to realize the spiral scanning mode is to accurately align the measuring probe with the rotational centre of the spindle. This paper proposes a novel centre alignment method of the measuring probe, which is considered to be suitable for any type of spiral scanning surface measurement systems. The proposed method, which only needs a tilted flat mirror as the artefact, makes the time-consuming centre alignment process of the measuring probe become much easier and faster. The operational steps of the proposed method are presented. Experiments have also been carried out based on a self-developed optical profiler with spiral scanning operation to verity the feasibility of the proposed method. The experimental results show that the proposed method is capable of conducting a fast alignment (only takes 3 min) while maintaining a high alignment accuracy. Evaluation of the alignment accuracy shows that the centering error is less than 10 µm on the mechanical guide rail stage and about 1.7 µm on the air-bearing stage.

“…To accurately measure the compound eye with many ommatidia on the spherical substrate, the STM-based self-developed tracking head equipped with a high-aspect ratio probe is integrated on-machine. As an extension of the previously published work regarding planar scanning of a micro-lens array on a flat substrate [21], a spindle, two linear stages, and an additional rotary stage were introduced to drive the probe in a substrate-normal direction for 3D spiral scanning. In this case, the scanning head can track the ommatidia features accurately, as illustrated in figure 1(b).…”

Section: Measurement Science and Technologymentioning

confidence: 99%

“…In this study, the fine center position on the machine coordinate is evaluated to be 42.035 mm and 13.569 mm in X and Y directions, respectively. Evaluation of the system performance, including the resolution and stability, has been previously studied using the diamond-turning machine [21].…”

Section: Fine Centering Of Probe Tip and System Verifica-mentioning

confidence: 99%

On-machine measurement of a slow slide servo diamond-machined 3D microstructure with a curved substrate

Zhu

Yang

et al. 2015

A scanning tunneling microscope-based multi-axis measuring system is specially developed for the on-machine measurement of three-dimensional (3D) microstructures, to address the quality control difficulty with the traditional off-line measurement process. A typical 3D microstructure of the curved compound eye was diamond-machined by the slow slide servo technique, and then the whole surface was on-machine scanned three-dimensionally based on the tip-tracking strategy by utilizing a spindle, two linear motion stages, and an additional rotary stage. The machined surface profile and its shape deviation were accurately measured on-machine. The distortion of imaged ommatidia on the curved substrate was distinctively evaluated based on the characterized points extracted from the measured surface. Furthermore, the machining errors were investigated in connection with the on-machine measured surface and its characteristic parameters. Through experiments, the proposed measurement system is demonstrated to feature versatile on-machine measurement of 3D microstructures with a curved substrate, which is highly meaningful for quality control in the fabrication field.