2021
DOI: 10.1088/1361-6501/ac20b4
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Non-equidistant scanning path generation for the evaluation of surface curvature in metrological scanning probe microscopes

Abstract: In this paper, we present a novel geometry information-based adaptive step (non-equidistance) scanning path generation method for metrological scanning probe microscopes. This method reduces the total amount of required data and enables faster surface scanning speed for large industrial workpieces while preserving adequate geometric information for performance evaluation after surface reconstruction. The grid points are generated iteratively while gaining knowledge of the surface geometry step by step. We focu… Show more

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“…Scanning probe microscopes provide us with structural and functional insights into biomaterial and cell surfaces [ 26 ]. In addition to visualizing morphological features at the molecular level and nanoscale, this analytical tool can be used for the direct measurement, manipulation, and sensing of matter in its native environment [ 27 ].…”
Section: Introductionmentioning
confidence: 99%
“…Scanning probe microscopes provide us with structural and functional insights into biomaterial and cell surfaces [ 26 ]. In addition to visualizing morphological features at the molecular level and nanoscale, this analytical tool can be used for the direct measurement, manipulation, and sensing of matter in its native environment [ 27 ].…”
Section: Introductionmentioning
confidence: 99%