Development of Cell Culture Microdevice Actuated by Piezoelectric Thin Films for Delivering Mechanical Vibratory Stimuli to Cells

Yamada, Yuhei; Umegaki, Genki; Kawashima, Takahiro; Nagai, Masao; Shibata, Takayuki; Masuzawa, Toru; Kimura, Tsuyoshi; Kishida, Akio

doi:10.1088/1742-6596/352/1/012027

Cited by 3 publications

(2 citation statements)

References 5 publications

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“…Poling treatments, such as room temperature poling and thermal poling, are performed between 70 and 160 C. [21][22][23][24] The advantage of thermal poling over room-temperature poling is that at a shorter time and a lower electric field, it generates more piezoelectric advantages. [25][26][27] Initially, a sample piezoelectric MEMS device was poled at room temperature, and the piezoelectric output voltages decreased after the reflow process.…”

Section: Piezoelectric Mems Devicementioning

confidence: 99%

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Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

Nogami¹,

Kobayashi²,

Okada³

et al. 2012

Jpn. J. Appl. Phys.

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An animal health monitoring system and a wireless sensor node aimed at preventing the spread of animal-transmitted diseases and improving pastoral efficiency which are especially suitable for chickens, were developed. The sensor node uses a piezoelectric microelectromechanical system (MEMS) device and an event-driven system that is activated by the movements of a chicken. The piezoelectric MEMS device has two functions: a) it measures the activity of a chicken and b) switches the micro-control unit (MCU) of the wireless sensor node from the sleep mode. The piezoelectric MEMS device is required to produce high output voltages when the chicken moves. However, after the piezoelectric MEMS device was reflowed to the wireless sensor node, the output voltages of the piezoelectric MEMS device decreased. The main reason for this might be the loss of residual polarization, which is affected by the thermal load during the reflow process. After the reflow process, we were not able to apply a voltage to the piezoelectric MEMS device; thus, the piezoelectric output voltage was not increased by repoling the piezoelectric MEMS device. To address the thermal load of the reflow process, we established a thermal poling treatment, which achieves a higher temperature than the reflow process. We found that on increasing the thermal poling temperature, the piezoelectric output voltages did not decreased low significantly. Thus, we considered that a thermal poling temperature higher than that of the reflow process prevents the piezoelectric output voltage reduction caused by the thermal load.

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Section: Piezoelectric Mems Devicementioning

confidence: 99%

“…There are several thermal poling treatments. [21][22][23][24] We used thermal poling to prevent the reflow process from reducing the PZT output voltages.…”

Section: Effects On the Output Characteristics Of The Piezoelectric M...mentioning

confidence: 99%

Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

Nogami¹,

Kobayashi²,

Okada³

et al. 2012

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

Mechano-active tissue scaffold system based on a magnetic nanoparticle embedded nanofibrous membrane

Fang

Shang

Jao

et al. 2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

Nogami

Kobayashi

Okada

et al. 2012

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

Development of Cell Culture Microdevice Actuated by Piezoelectric Thin Films for Delivering Mechanical Vibratory Stimuli to Cells

Cited by 3 publications

References 5 publications

Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

Mechano-active tissue scaffold system based on a magnetic nanoparticle embedded nanofibrous membrane

Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

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