Development of electroforming process for soft x-ray ellipsoidal mirror

Kume, Takehiro; Takei, Yoshinori; Egawa, Satoru; Motoyama, Hiroto; Takeo, Yoko; Yamaguchi, Gota; Mimura, Hidekazu

doi:10.1063/1.5057432

Cited by 30 publications

(5 citation statements)

References 11 publications

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“…The error is especially affected by the electrodeposition conditions. Previous studies on electroformed x-ray optics found that accuracy in shape replication on the order of several tens of nm in peak-to-valley is achieved under optimized electrodeposition conditions 6) . However, few studies have been done on the improvement of surface roughness of the electroformed replicas.…”

Section: Introductionmentioning

confidence: 98%

Effect of Electrodeposition Conditions on Surface Roughness of Copper Electroformed Replicas

Yamaguchi

Mimura

2020

IJEM

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With recent developments in ultraprecision machining methods, the manufacture of devices with sub-10 nm shape accuracy and with surface smoothness at the atomic level has been realized. However, it takes a lot of work and time to fabricate such precise devices. Electroforming, a replication technique using electrodeposition, is expected to be an efficient fabrication process for these device s. In this paper, we report fundamental research on electroform replication of ultra-smooth masters. Smooth float glass substrates that have a root-mean-square surface roughness of 0.1 nm were used as masters. Copper electroformed replicas were fabricated to investigate the relationship between electrodeposition conditions and surface roughness of the replicas. Experimental results indicate that the microstructures of the electroplated films affect the surface roughness of replicas.

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Section: Introductionmentioning

confidence: 98%

Effect of Electrodeposition Conditions on Surface Roughness of Copper Electroformed Replicas

Yamaguchi

Mimura

2020

IJEM

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“…The traditional Wolter mirror is small in size and has enclosed inner reflecting surfaces. The fabrication method is primarily based on the mandrel replication method and can be found in various publications [6,7] . The fabrication process results in a mandrel with high-profile accuracy that is obtained by single-point diamond turning, and the mandrel profile is duplicated by electroforming nickel.…”

Section: Optical Considerationsmentioning

confidence: 99%

Optical considerations and ray tracing simulation of an open-type Wolter microscope for implosion imaging diagnostics

Li,

Jiang

2023

6th Optics Young Scientist Summit (OYSS 2023)

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Controlled nuclear fusion through laser inertial confinement fusion (ICF) is currently being developed. It is of great significance for energy security, high energy physics and national defense, etc. High-precision X-ray microscopic imaging techniques have become the key to revealing material phenomena and laws under extreme conditions. This paper proposes an open-type Wolter microscope configuration. By utilizing the configuration, a number of modern polishing techniques can be utilized and a balance between imaging performance and the feasibility of optical processing can be achieved. The original enclosed and inner Wolter mirror surfaces have been changed to unclosed outer surfaces. The configuration is characterized by high spatial resolution, large depth of field, and high throughput, among other features. And these characteristics are urgently needed in high-precision X-ray imaging diagnostics. The technical scheme and optical considerations of the configuration are detailed. Ray tracing simulation is used to design key optical parameters and evaluate system imaging performance. In addition, this configuration has potential for various diagnostic purposes, including sub-micron spatial resolution imaging, high-energy high-throughput imaging, multi-color and multichannel imaging, and more.

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“…Therefore, the inner surface of Wolter-Ⅰ type mirrors should be highly accurate and smooth to conduct high-resolution observations. Our group has been developing a highprecision Ni electroforming method of full-shell grazing incidence mirrors for Wolter-Ⅰ type mirrors (Figure 2) [5][6][7][8][9] . A Ni layers with a thickness of less than 1 mm are formed on the super polished master mandrels by electroforming and the mirror is separated from the mandrel utilizing the difference of coefficients of thermal expansion between Ni and the fused silica.…”

Section: Introductionmentioning

confidence: 99%

Development of deposition system for the inner surface of Wolter mirror for x-ray telescopes

Mohri,

Ito,

Ito

et al. 2023

Advances in X-Ray/Euv Optics and Components XVIII

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Large Wolter mirrors fabricated by high-precision Ni electroforming process have been used for X-ray telescopes. Since the replication accuracy of these mirrors is on the order of 100 nm, the surface figure correction is necessary for improving the figure accuracy. Recently, we have proposed a new figure correction scheme utilizing a Si layer on the mirror surface. The thickness of Si film can be measured with accuracy at a 1 nm level by a thickness measurement gauge, and Si removal process will be applied so that the figure error is reduced. In this study, we developed the DC magnetron sputtering system especially for depositing a Si on the inner surface of the Wolter mirror. By optimizing the parameters such as Ar gas pressure and the sputter power, we demonstrated a coating of uniform Si layer on the Wolter mirror. The uniform Si layer with a thickness of 90 nm was successfully produced with an accuracy of ±10 nm in PV(Peak-to-Valley). The uniformity of the deposition using this method was 10 nm of PV(Peak-to-Valley).

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Development of electroforming process for soft x-ray ellipsoidal mirror

Cited by 30 publications

References 11 publications

Effect of Electrodeposition Conditions on Surface Roughness of Copper Electroformed Replicas

Effect of Electrodeposition Conditions on Surface Roughness of Copper Electroformed Replicas

Optical considerations and ray tracing simulation of an open-type Wolter microscope for implosion imaging diagnostics

Development of deposition system for the inner surface of Wolter mirror for x-ray telescopes

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