Development of filtered DC metal plasma ion implantation and coating deposition methods based on high-frequency short-pulsed bias voltage application

Ryabchikov, A. I.; Ryabchikov, I.A.; Stepanov, I.B.

doi:10.1016/j.vacuum.2005.01.046

Cited by 35 publications

(7 citation statements)

References 9 publications

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“…Another particularity of the CAE method consists of the significant roughness of the coated surfaces, resulting from droplets ejected by the cathode due to its local melting. Considering this issue, different techniques have been developed, including venetian blinds, magnetic shielding, increased deposition pressure, as well as the development of more sophisticated methods consisting mainly of short-pulsed voltage applied on the substrate [27][28][29][30][31].…”

Section: Introductionmentioning

confidence: 99%

Enhancement of the Corrosion Resistance of 304 Stainless Steel by Cr–N and Cr(N,O) Coatings

et al. 2018

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Chromium nitride and oxynitride coatings were deposited as monolayers ((Cr-N), Cr(N,O)) and bilayers (Cr-N/Cr(N,O), Cr(N,O)/Cr-N) on 304 steel substrates by reactive cathodic arc method. The coatings were characterised by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectrometry (EDS), surface profilometry, and scratch tester. The anticorrosive properties of the coatings were assessed by electrochemical tests in 0.10 M NaCl + 1.96 M H 2 O 2 , carried out at 24 • C. Cr 2 N, CrN, and Cr(N,O) phases were identified in the coatings by grazing incidence X-ray diffraction (GI-XRD) measurements. The measured adhesion values ranged from 19 N to 35 N, the highest value being obtained for the bilayer with Cr(N,O) on top. Electrochemical tests showed that Cr(N,O) presence in both mono-and bilayered coatings determined the lowest damage in corrosive solution, as compared to the Cr-N coatings. This improvement was ascribed to the more compact structure, lower coatings porosity, and smoother surface.

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Section: Introductionmentioning

confidence: 99%

Enhancement of the Corrosion Resistance of 304 Stainless Steel by Cr–N and Cr(N,O) Coatings

et al. 2018

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“…1.) that has previously been described in detail [18]. The vacuum-arc plasma generator containing a aluminium cathode, which operated in DC mode with an arc current of 90 A, was set on the side flange of the vacuum chamber.…”

Section: Methodsmentioning

confidence: 99%

“…The substrates were vertically mounted near the axis of plasma flux at a distance of 38 сm from the cathode of vacuum-arc evaporator. Initially, the surface of the substrate was treated by ions using an argon plasma and highfrequency short-pulse bias [18].…”

Section: Methodsmentioning

confidence: 99%

Unfiltered Aluminium Vacuum Arc Plasma Application for High-Frequency Short-Pulse Plasma Immersion Ion Implantation

Ryabchikov

Sivin

Ivanova

et al. 2014

AMR

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This paper is devoted to the studying of the dynamical changes in the density of aluminium microparticles (MPs) on the substrate surface made of stainless steel, immersed in vacuum arc plasma, at high-frequency short-pulse negative bias potential. It is shown experimentally that the density of aluminium MPs on the substrate surface is decreased dynamically by 3 orders when the treatment time is increased from 15 s to 3 min at the bias potential –2 kV. A possibility of the application of MPs unfiltered vacuum arc plasma for high-frequency short-pulse plasma immersion ion implantation to form the intermetallic layers is discussed.

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“…Various surface modification techniques are often used to enhance the above mentioned properties of metals and alloys (including aluminum), as well as sintered metal powder materials, such as deposition of hard, superhard and wear resistant coatings, surface treatment with concentrated energy flows, surface saturation with metals and gases atoms, etc. [1][2][3][4][5][6][7][8][9][10][11][12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Aluminum surface modification by electron-ion-plasma methods

Крысина¹,

Петрикова²,

Шугуров³

et al. 2018

MATEC Web Conf.

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Abstract. The paper focuses on detection and structural-phase justification of the modes of combined electron-ion plasma treatment of commercially pure А7 grade aluminum carried out in a single vacuum cycle and enabling to enhance mechanical (microhardness) and tribological (wear resistance) properties of the material. Commercially pure А7 grade aluminum underwent combined surface treatment, including deposition of titanium coating by means of vacuum-arc technique and further mixing of the coating/substrate system by intense pulsed electron beam. The varied parameters were energy density of the electron beam (10, 15, 20) J/cm 2 and the number of impact pulses (3-100); the thickness of titanium coating was 0.5 µm. Electron-ion plasma treatment of aluminum was carried out in a single vacuum cycle. Optical and scanning electron microscope investigations, measuring of microhardness and tribological tests allowed defining the modes when hardness and wear resistance of the modified surface layer increases manifold in comparison to the initial properties of commercially pure aluminum.

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Development of filtered DC metal plasma ion implantation and coating deposition methods based on high-frequency short-pulsed bias voltage application

Cited by 35 publications

References 9 publications

Enhancement of the Corrosion Resistance of 304 Stainless Steel by Cr–N and Cr(N,O) Coatings

Enhancement of the Corrosion Resistance of 304 Stainless Steel by Cr–N and Cr(N,O) Coatings

Unfiltered Aluminium Vacuum Arc Plasma Application for High-Frequency Short-Pulse Plasma Immersion Ion Implantation

Aluminum surface modification by electron-ion-plasma methods

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