Development of hydraulic linear actuator using thin film SMA

Shin, Dongsuk D.; Mohanchandra, K. P.; Carman, Gregory P.

doi:10.1016/j.sna.2004.01.025

Cited by 51 publications

(32 citation statements)

References 19 publications

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“…Since it is a thermal actuator, the actuation frequency is relatively low; however, it can sustain very high pressures. Boden et al (2006) Recently, larger flow rates of 2.53 ml/s have been achieved for a thin-film TiNi SMA pump with corresponding velocities of 5 mm/s (Shin et al 2005). This flow rate represents a three-order-of-magnitude increase over previously published SMA pump studies.…”

Section: Thermalmentioning

confidence: 99%

See 1 more Smart Citation

Recent advances in microscale pumping technologies: a review and evaluation

Iverson

Garimella

2008

Microfluid Nanofluid

427

249

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Micropumping has emerged as a critical research area for many electronics and biological applications. A significant driving force underlying this research has been the integration of pumping mechanisms in micro Total Analysis Systems (μTAS) and other multi-functional analysis techniques. Uses in electronics packaging and micromixing and microdosing systems have also capitalized on novel pumping concepts. The present work builds upon a number of existing reviews of micropumping strategies by focusing on the large body of micropump advances reported in the very recent literature. Critical selection criteria are included for pumps and valves to aid in determining the pumping mechanism that is most appropriate for a given application. Important limitations or incompatibilities are also addressed. Quantitative comparisons are provided in graphical and tabular forms.

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Section: Thermalmentioning

confidence: 99%

“…Also, degradation of the actuator performance has been found in some long-term high voltage operation due to the build-up of surface charges at the insulator inside the capacitor. This, in turn, reduces the internal electric field strength and corresponding stroke (Shin et al 2005). …”

Section: Mechanical Displacement Pump Guidelinesmentioning

confidence: 99%

Recent advances in microscale pumping technologies: a review and evaluation

Iverson

Garimella

2008

Microfluid Nanofluid

427

249

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“…Reciprocally, the fluid is forced into the inlet check valve when the pump chamber expands, while the outlet check valve prevents back flow from the outlets. The two-way actuation can be obtained by polyimide-spring bias [87], two-way antagonistic actuation [87], an SMA-Si driving membrane [88], and gas pressurization [89,90]. Another actuator that utilizes thin-film SMA to provide out-of-plane displacement is the cantilever type actuator.…”

Section: Thin-film Sma Actuatormentioning

confidence: 99%

Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical Devices

2015

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Shape memory alloys (SMAs) are a class of smart materials characterized by shape memory effect and pseudo-elastic behavior. They have the capability to retain their original form when subjected to certain stimuli, such as heat or a magnetic field. These unique properties have attracted many researchers to seek their application in various fields including transportation, aerospace, and biomedical. The ease process adaption from semiconductor manufacturing technology provides many opportunities for designing micro-scale devices using this material. This paper gives an overview of the fabrication and manufacturing technique of thin-film and bulk micromachined SMAs. Key features such as material properties, transformation temperature, material composition, and actuation method are also presented. The application and micromechanism for both thin-film and bulk SMA are described. Finally, the microactuator devices emphasized for biomedical applications such as microgrippers and micropumps are highlighted. The presented review will provide information for researchers who are actively working on the development of SMA-based microscale biomedical devices.

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“…However, in micro-SMA actuators, fabricated using silicon micromachining processes, a construction of a mechanism for inducing a bias force is a challenging task. In micro-pumps, a bias force is applied on a SMA membrane by the fluid pressure [9][10][11]. Some micro-actuators used a bilayer (unimorph) structure in which the bias force is applied by an elastic layer attached to the SMA layer [12].…”

Section: Introductionmentioning

confidence: 99%

A novel shape memory alloy microactuator for large in-plane strokes and forces

Kabla

Ben-David

Shilo

2016

Smart Mater. Struct.

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This paper describes a novel concept for in-plane actuators based on a thin free-standing shape memory alloy (SMA) film. The presented guidelines can be used to design a variety of actuators that can provide a combination of large strokes and forces for linear and rotary motions. A prototype actuator demonstrated a displacement of 45 μm related to 4.5% of the SMA film length, and a force of up to 115 mN related to a stress of 230 MPa in the SMA film without plastic deformations. These capabilities allow the actuator to work against the stiff springs that are essential for the devices' ability to sustain vibrations, impacts, and accelerations.

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Development of hydraulic linear actuator using thin film SMA

Cited by 51 publications

References 19 publications

Recent advances in microscale pumping technologies: a review and evaluation

Recent advances in microscale pumping technologies: a review and evaluation

Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical Devices

A novel shape memory alloy microactuator for large in-plane strokes and forces

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