Development of integrated suspension system for a nanoslider with an MR head transducer

Ohwe, T.; Mizoshita, Y.; Yoneoka, S.

doi:10.1109/20.281344

Cited by 24 publications

(4 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Loaddisplacement plots of indentations made at 0.2 mN peak indentation load on all samples exhibit several displacement discontinuities or pop-in marks during first and second loading steps of the indentation, as shown by arrows in Fig. 16 load of about 0.16 mN suggests that it probably has the highest resistance to crack formation and propagation. Pop-in marks in the loading curves result from sudden penetration of the tip into the sample.…”

Section: A Hardness and Elastic Modulusmentioning

confidence: 88%

Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices

1997

View full text Add to dashboard Cite

Microelectromechanical systems (MEMS) devices are made of doped single-crystal silicon, LPCVD polysilicon films, and other ceramic films. Very little is understood about tribology and mechanical characterization of these materials on micro-to nanoscales. Micromechanical and tribological characterization of p-type (lightly boron-doped) single-crystal silicon (referred to as "undoped"), p 1 -type ( boron doped) single-crystal silicon, polysilicon bulk, and n 1 -type (phosphorous doped) LPCVD polysilicon films have been carried out. Hardness, elastic modulus, and scratch resistance of these materials were measured by nanoindentation and microscratching using a nanoindenter. Friction and wear properties were measured using an accelerated ball-on-flat tribometer. It is found that the undoped silicon and polysilicon bulk as well as n 1 -type polysilicon film exhibit higher hardness and elastic modulus than the p 1 -type silicon. The polysilicon bulk and n 1 -type polysilicon film exhibit the lowest friction and highest resistance to scratch and wear followed by the undoped silicon and with the poorest behavior of the p 1 -type silicon. During scratching, the p 1 -type silicon deforms like a ductile metal. 54

show abstract

Section: A Hardness and Elastic Modulusmentioning

confidence: 88%

Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices

1997

View full text Add to dashboard Cite

show abstract

“…Horizontal thin-film heads with a single-crystal silicon substrate, referred to as silicon planar head sliders 1 The MS was received on 2 June 1999 and was accepted after revision for publication on 15 December 1999. are mass produced using integrated-circuit (IC) technology [2,3]. Several integrated head-suspension microdevices have been fabricated for contact recording applications [4,5]. High-bandwidth servo-controlled microactuators have been fabricated for ultra-high-track-density applications which serve as the fine position control element of a two-stage coarse/fine servo system, coupled with a conventional actuator [6,7].…”

Section: Introductionmentioning

confidence: 99%

Tribology on the macroscale to nanoscale of microelectromechanical system materials: A review

Bhushan

2001

Proceedings of the Institution of Mechanical Engineers, Part J:

View full text Add to dashboard Cite

Silicon-based microelectromechanical system (MEMS) devices are made from single-crystal silicon, polycrystalline silicon (polysilicon) films obtained by low-pressure chemical vapour deposition and certain ceramic films. For high-temperature applications, SiC films are being developed to replace polysilicon films. Tribology in the MEMS devices requiring relative motion is of importance. Atomic force microscopy/friction force microscopy (AFM/FFM) and nanoindentation techniques have been used for tribological studies on a microscale to nanoscale on materials of interest. These techniques have been used to study surface roughness, friction, scratching and wear, indentation and boundary lubrication of bulk and treated silicon, polysilicon films and SiC films, Macroscale friction and wear tests have also been conducted using the ball-on-flat tribometer. Measurements of microscale and macroscale frictional forces show that friction values on both scales of all the silicon samples are about the same for different silicon materials and higher than that of SiC. The microscale values are lower than the macroscale values as there is less ploughing contribution in the microscale measurements. Surface roughness has an effect on friction. In microscale and macroscale tests, C+-implanted, oxidized and plasma-enhanced chemically vapour-deposited oxide-coated single-crystal silicon samples exhibit much larger scratching and wear resistance than untreated samples. Polysilicon films and undoped single-crystal silicon show similar friction and wear characteristics. The doping of polysilicon film does not significantly affect its tribological properties. Microscratching, microwear and nanoindentation, and macroscale friction and wear studies indicate that SiC films are superior to the other materials currently used in MEMS devices. Higher hardness and fracture toughness of the SiC film is believed to be responsible for its superior mechanical integrity and lower friction. Chemically grafted self-assembled monolayers and chemically bonded liquid lubricants show promising performance for boundary lubrication in MEMS devices.

show abstract

“…Several integrated head! suspension microdevices have been fabricated for contact recording applications (Hamilton, 1991;Ohwe et al, 1993). High-bandwidth servocontrolled microactuators have been fabricated for ultrahigh-track-density applications, which serve as the frne-position control element of a two-stage, coarse/frne servo system, coupled with a conventional actuator (Miu and Tai, 1995;Fan et aI., 1995;Horsley et aI., 1998).…”

Section: Mold Fabricationmentioning

confidence: 98%

Micro/Nanoscale Tribology of Mems Materials, Lubricants and Devices

Sundararajan

Bhushan

2001

Fundamentals of Tribology and Bridging the Gap Between the Macro- And Micro/Nanoscales

View full text Add to dashboard Cite

Development of integrated suspension system for a nanoslider with an MR head transducer

Cited by 24 publications

References 2 publications

Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices

Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices

Tribology on the macroscale to nanoscale of microelectromechanical system materials: A review

Micro/Nanoscale Tribology of Mems Materials, Lubricants and Devices

Contact Info

Product

Resources

About