Development of Linear pMUT Array with Low Mechanical Crosstalk Toward Ultrasonography Applications

Thao, Pham Ngoc

doi:10.1109/transducers50396.2021.9495756

Cited by 6 publications

(3 citation statements)

References 10 publications

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“…It also induces parasitic effects and decreases receive sensitivity. Careful design of the array could not only overcome these values, but also increase the effective electromechanical coupling coefficient of the array [88].…”

Section: Implications For Medical Imagingmentioning

confidence: 99%

Review of pMUTs for medical imaging: towards high frequency arrays

Shivalingaprasad¹,

Arora²,

Krishnan³

2023

Biomed. Phys. Eng. Express

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pMUT (piezoelectric Micromachined Ultrasound Transducer) devices are an alternative that can overcome the limitations associated with conventional ultrasound transducers. pMUT’s are reported for many applications such as range-finding, biometrics, and ultrasound imaging. However, pulse-echo measurements from fabricated pMUT devices/arrays are not commonly reported in literature, a reason being lack of desirable performance either in transmit or receive mode of operation. There is also limited information about the design, fabrication and characterization of 2D-pMUT-arrays operating at high frequencies (>15 MHz) in water medium. In this paper we review ‘state-of-the-art’ for pMUT-array based medical ultrasound imaging, with a focus on their pulse-echo imaging capability. Over the next 3-5 years, we expect further improvement in piezoelectric thin film deposition techniques, on-chip integration of pre-amplification circuits and further miniaturization of pMUT devices, thus paving the way for development of pMUT-array based high frequency medical imaging systems.

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Section: Implications For Medical Imagingmentioning

confidence: 99%

Review of pMUTs for medical imaging: towards high frequency arrays

Shivalingaprasad¹,

Arora²,

Krishnan³

2023

Biomed. Phys. Eng. Express

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“…This coupling generates parasitic and spurious modes in the surrounding PMUT, which can interfere with the normal operation of the oscillator elements and even the entire PMUT array. This interference is known as crosstalk [ 30 , 31 ]. The stepped-tube PMUT has a smaller side lobe level, which theoretically reduces the array crosstalk effect caused by acoustic coupling in this study.…”

Section: Methodsmentioning

confidence: 99%

Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on Sc0.2AI0.8N Thin Films

Li,

Lyu,

Safari

et al. 2023

Micromachines

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This paper presents a novel piezoelectric micromachined ultrasonic transducer (PMUT) with theoretical simulation, fabrication, and testing. Conventional methods using a PCB or an external horn to adjust the PMUT acoustic field angle are limited by the need for transducer size. To address this limitation, the stepped-tube (expanded tube) backside cavity PMUT has been proposed. The stepped-tube PMUT and the tube PMUT devices have the same membrane structure, and the acoustic impedance matching of the PMUT is optimized by modifying the boundary conditions of the back cavity structure. The acoustic comparison experiments show that the average output sound pressure of the stepped-tube backside cavity PMUT has increased by 17%, the half-power-beam-width (θ-3db) has been reduced from 55° to 30° with a reduction of 45%, and the side lobe level signal is reduced from 147 mV to 66 mV. In addition, this work is fabricated on an eight-inch wafer. The process is compatible with standard complementary metal oxide semiconductor (CMOS), conditions are stable, and the cost is controllable, plus it facilitates the batch process. These conclusions suggest that the stepped-tube backside cavity PMUT will bring new, effective, and reliable solutions to ranging applications.

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“…The degree of crosstalk between two adjacent transducers fell from -13.4 dB to -17 dB. Several acoustic isolation approaches, such as the usage of mesa-type structures, ring-shaped pillars made of different materials, or a combination of both, have been implemented to reduce crosstalk [33], [34].…”

Section: Introductionmentioning

confidence: 99%

An Experimental and Numerical Study of Crosstalk Effects in PMUT Arrays

Abdalla,

Massimino,

D’Argenzio

et al. 2023

IEEE Sensors J.

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This study provides a comprehensive characterization of a 4 × 4 PMUT array suited for in-air applications. Crosstalk can be viewed as a lack of isolation among the transducers, with possible reasons including the electrical, acoustic, and structural coupling among the transducers. This study focuses on acoustic coupling as the primary cause of crosstalk, since the influence of electrical and structural coupling on crosstalk is shown to be negligible by comparing experimental tests and numerical analysis conducted in vacuum and in air. It is expected that acoustic coupling among diaphragms occurs due to air-connected cavities. Consequently, several scenarios are investigated in which the cavities are either partially or completely acoustically disconnected. The computed response spectra of the PMUTs demonstrate that the presence of secondary peaks, which indicated the presence of crosstalk, is diminished when the PMUTs are decoupled partially or completely as compared to an open cavity. The conducted acoustic tests also demonstrated that crosstalk impacts the intensity and directivity of the acoustic wave produced by the array.

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Development of Linear pMUT Array with Low Mechanical Crosstalk Toward Ultrasonography Applications

Cited by 6 publications

References 10 publications

Review of pMUTs for medical imaging: towards high frequency arrays

Review of pMUTs for medical imaging: towards high frequency arrays

Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on Sc0.2AI0.8N Thin Films

An Experimental and Numerical Study of Crosstalk Effects in PMUT Arrays

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