Development of Low Parasitic Light Sensitivity and Low Dark Current 2.8 μm Global Shutter Pixel

Yokoyama, Toshifumi; Tsutsui, Masafumi; Suzuki, Motohiro; Nishi, Yoshiaki; Mizuno, Ikuo; Lahav, Assaf

doi:10.3390/s18020349

Cited by 12 publications

(9 citation statements)

References 8 publications

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“…Furthermore, this parasitic photodiode gave rise to parasitic light sensitivity (PLS). Positive correlations between 1/PLS and QE were observed in [ 11 ]. Also, different from [ 3 , 4 ], in this work the BJT temperature pixels were readout by DSADCs, which are the state-of-the-art quantization circuitries for temperature sensors.…”

Section: Pixel Sf’s Temperature and Process Dependency Process Sementioning

confidence: 95%

Compensation for Process and Temperature Dependency in a CMOS Image Sensor

Xie

Theuwissen

2019

Sensors

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This paper analyzes and compensates for process and temperature dependency among a (Complementary Metal Oxide Semiconductor) CMOS image sensor (CIS) array. Both the analysis and compensation are supported with experimental results on the CIS’s dark current, dark signal non-uniformity (DSNU), and conversion gain (CG). To model and to compensate for process variations, process sensors based on pixel source follower (SF)’s transconductance gm,SF have been proposed to model and to be compared against the measurement results of SF gain ASF. In addition, ASF’s thermal dependency has been analyzed in detail. To provide thermal information required for temperature compensation, six scattered bipolar junction transistor (BJT)-based temperature sensors replace six image pixels inside the array. They are measured to have an untrimmed inaccuracy within ±0.5 ⁰C. Dark signal and CG’s thermal dependencies are compensated using the on-chip temperature sensors by at least 79% and 87%, respectively.

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Section: Pixel Sf’s Temperature and Process Dependency Process Sementioning

confidence: 95%

Compensation for Process and Temperature Dependency in a CMOS Image Sensor

Xie

Theuwissen

2019

Sensors

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“…For analysis of the proposed structure, we used a commercial 3D optical simulator with the finite-difference time-domain (FDTD) method [21]. The FDTD method has been established as useful for investigating the optical performances of CMOS image sensors [22,23]. The overall simulated conditions are shown in Table 1.…”

Section: Simulation Resultsmentioning

confidence: 99%

Front-Inner Lens for High Sensitivity of CMOS Image Sensors

Seok

Kim

2019

Sensors

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Due to the continuing improvements in camera technology, a high-resolution CMOS image sensor is required. However, a high-resolution camera requires that the pixel pitch is smaller than 1.0 μm in the limited sensor area. Accordingly, the optical performance of the pixel deteriorates with the aspect ratio. If the pixel depth is shallow, the aspect ratio is enhanced. Also, optical performance can improve if the sensitivity in the long wavelengths is guaranteed. In this current work, we propose a front-inner lens structure that enhances the sensitivity to the small pixel size and the shallow pixel depth. The front-inner lens was located on the front side of the backside illuminated pixel for enhancement of the absorption. The proposed structures in the 1.0 μm pixel pitch were investigated with 3D optical simulation. The pixel depths were 3.0, 2.0, and 1.0 μm. The materials of the front-inner lens were varied, including air and magnesium fluoride (MgF2). For analysis of the sensitivity enhancement, we compared the typical pixel with the suggested pixel and confirmed that the absorption rate of the suggested pixel was improved by a maximum of 7.27%, 10.47%, and 29.28% for 3.0, 2.0, and 1.0 μm pixel depths, respectively.

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“…The 10 µs exposure is low enough to record active marine particles, such as plankton, with mean in situ swimming speeds ranging from about 10 to 90 mm/s [24] (see TABLE 1 for some species). The efficient global shutter [25] with a low parasitic light sensitivity in the camera also facilitates capturing the shape of fast-moving targets.…”

Section: Measurement Systemmentioning

confidence: 99%

Digital In-Line Holography for Large-Volume Analysis of Vertical Motion of Microscale Marine Plankton and Other Particles

Liu

Takahashi

Lindsay

et al. 2021

IEEE J. Oceanic Eng.

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Measuring the distribution, characteristics and dynamics of marine micro-scale plankton and other particulate matter is essential to understand the vertical flux of elements in the marine environment. Digital holographic microscopy is a powerful approach for measuring these and studying their 3D trajectories in a relatively large observation volume. This paper demonstrates a compact, inline digital holographic microscope that allows large-volume and high-resolution recording of marine particles through combining a continuous wave laser and a short exposure CMOS camera with efficient global shutters. A resolution of better than 10 µm is demonstrated in air and the minimum distinguishable size of targets recorded in water is approximately 20 µm. The maximum volumetric throughput of the setup is 1904 mL/s. The microscope can take motion blur free holograms of particles moving at up to 490 mm/s in theory, and has been tested in the ~200 mm/s flowing water. The orientation of the measured volume improves the ability of digital holography in profiling sinking rates and active vertical migration. The system was tested onboard a research vessel to record a range of live plankton and other particles. The motion of some samples, including the sinking motion and swimming motion, was analysed using custom developed image processing software. The experimental results show that the combination of high resolution and a large volume over which motion of sparse-distribution particles can be tracked, can improve the ability to differentiate between different types of marine particle and identify behaviours of live plankton.

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Development of Low Parasitic Light Sensitivity and Low Dark Current 2.8 μm Global Shutter Pixel

Cited by 12 publications

References 8 publications

Compensation for Process and Temperature Dependency in a CMOS Image Sensor

Compensation for Process and Temperature Dependency in a CMOS Image Sensor

Front-Inner Lens for High Sensitivity of CMOS Image Sensors

Digital In-Line Holography for Large-Volume Analysis of Vertical Motion of Microscale Marine Plankton and Other Particles

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