Development of material measures for performance verifying surface topography measuring instruments

Abstract

The development of two irregular-geometry material measures for performance verifying surface topography measuring instruments is described. The material measures are designed to be used to performance verify tactile and optical areal surface topography measuring instruments. The manufacture of the material measures using diamond turning followed by nickel electroforming is described in detail. Measurement results are then obtained using a traceable stylus instrument and a commercial coherence scanning interferometer, and the results are shown to agree to within the measurement uncertainties. The material measures are now commercially available as part of a suite of material measures aimed at the calibration and performance verification of areal surface topography measuring instruments.

Calibration and verification of areal surface texture measuring instruments

“…12 and [119]). More recently, finer scale material measures produced by lapping [45] or electron beam lithography [19] have been developed.…”

“…Whilst it is common for instrument users to carry out gauge repeatability and reproducibility (R&R) studies [34], there are no formal procedures for performance verification. ISO 25178 part 700 will contain information about how to performance verify an areal surface topography instrument and some guidance is given elsewhere [119] using an irregular (type AIR) material measure.…”

Performance Evaluation of a Robot-Mounted Interferometer for an Industrial Environment

“…This compact nature also enables robotic deployment, as demonstrated in [22][23][24][25] through the combined use of a laser line scanner (low resolution, for large area coverage) and a scanning interferometer (Heliotis H6, high resolution, for local high resolution measurements) mounted on a robot arm. While the performance evaluation of such high resolution instrumentation in a laboratory environment has been widely addressed [26][27][28][29][30][31][32][33], the application of these sensors in non-ideal, shop-floor applications, as well as in robotic deployment, clearly demonstrates the need for re-evaluating and extending performance standards [34].…”

Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments

“…In order to perform a cost-and time-efficient calibration of all characteristics, it is essential to use as few as possible material measures that feature and calibrate all relevant metrological characteristics reliably. A set of five single material measures for measuring all metrological characteristics has been introduced with the NPL BentoBox [13] in 2013 which also includes material measures for the calibration of the measurement of areal surface texture parameters [14]. Additionally, the practical specification of topography measuring instruments based on the metrological characteristics is subject to research work and aims at achieving acceptance of the new definitions within the industrial application [15,16].…”