Development of Micro Probe System for Micro Measurement Center

Abstract

We developed two types of contact probe for micromeasurement. The first type -a dynamic motion probe with a probe ball 200 μm in diameter- is driven in a circle by piezoelectric (PZT) actuators at a radius of 3 μm and frequency of 10 Hz. The signal noise ratio indicates that the probe’s angle resolution is 1° and contact detection resolution of 50 nm. The second type of contact probe is static and developed for compact design. In addition to having a structure similar to earlier probes developed with a crossbeam plate, this one has a measurement ball glued to the front and back of the center plate. Optical sensors measure ball movement, which is synchronized with the contact probe. Basic experiments confirmed that the new probe has a measurement resolution of 50 nm.

3.1.2 - Development of a 3D capable probing system based on electrical near-field interactions for micro- and nanocoordinate metrology

“…The probing direction can be derived from the relation between sensor signal and circular sensor positions, cf. [8]. The algorithms to determine the probing direction will be described in detail in the next section.…”

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

“…But differing from the force signal of a tactile probe, the electrical signal is only a scalar, and the direction information has to be gathered otherwise. If a mechanical circular movement is applied the probing direction can be derived from the relation between sensor signal and circular sensor position (Ogura and Okazaki, 2002). The frequency of the circular movement and the speed of the vector calculation should be high enough to deliver the NMM-1 a 3-D probing vector during the scanning motion.…”

Resonant probing system comprising a high accurate uniaxial nanoprobe and a new evaluation unit

“…The utilization of an oscillating probe tip can overcome sticking effects [4,[7][8][9]. Therefore, a semi-contact mode is realized which avoids attractions on the probe tip because capillary force depends on the contact time and the contact force [4].…”

“…Current oscillating probing systems utilize the piezoelectric effect to realize the actuator and sensor structures [4,[7][8][9]. The main problem of these systems is crosstalk caused by disturbing transversal deformations of the lateral piezoelectric actuators.…”

“…The thermal stability and the small spatial area are the main advantages of the serpentine spring [12]. The dimensioning of the spring was done in Ansoft Ansys for the criteria high stiffness in z-and y-direction and low stiffness in x-direction (5-20 N m −1 , [4][5][6][7][8][9]) to avoid damage of the specimen. The width b of the spring (thickness of the device layer) was set to 100 μm to get a high electrode area.…”