Initiatives of Precision Engineering at the Beginning of a Millennium
DOI: 10.1007/0-306-47000-4_128
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Development of Micro-roughness Measuring Probe Using Longitudinal Tapping Mode by Ultrasonic Vibration Sensor

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“…The fine servo driving mechanism is structured as an active balance system, which is shown in Fig. 11, such that a reaction force from the fine servo driving mechanism does not influence the control of the coarse servo driving mechanism [4]. The active balance system has been simplified for one PZT method finally.…”
Section: Sensitivity Testmentioning
confidence: 99%
“…The fine servo driving mechanism is structured as an active balance system, which is shown in Fig. 11, such that a reaction force from the fine servo driving mechanism does not influence the control of the coarse servo driving mechanism [4]. The active balance system has been simplified for one PZT method finally.…”
Section: Sensitivity Testmentioning
confidence: 99%