Development of nanopore-based near ultraviolet vertical-cavity surface emitting lasers

Zhang, Cheng; ElAfandy, Rami T.; Zhang, Jerry; Chen, Songtao; Nurmikko, A. V.; Han, Jung

doi:10.1117/12.2510269

Cited by 5 publications

(5 citation statements)

References 34 publications

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“…In addition, new applications in medical diagnostics and therapy, atomic clocks, and UV curing could be facilitated. However, previously reported UV VCSELs were mainly optically pumped and all emitted in the UVA (320–400 nm). − The low Al-content AlGaN cavities employed in the previous demonstrations are limited to emission wavelengths near the bandgap of GaN (360 nm) and prevent extension into the UVB (280–320 nm) and UVC (<280 nm) spectral ranges.…”

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confidence: 99%

A 310 nm Optically Pumped AlGaN Vertical-Cavity Surface-Emitting Laser

et al. 2020

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Ultraviolet light is essential for disinfection, fluorescence excitation, curing, and medical treatment. An ultraviolet light source with the small footprint and excellent optical characteristics of vertical-cavity surface-emitting lasers (VCSELs) may enable new applications in all these areas. Until now, there have only been a few demonstrations of ultraviolet-emitting VCSELs, mainly optically pumped, and all with low Al-content AlGaN cavities and emission near the bandgap of GaN (360 nm). Here, we demonstrate an optically pumped VCSEL emitting in the UVB spectrum (280–320 nm) at room temperature, having an Al0.60Ga0.40N cavity between two dielectric distributed Bragg reflectors. The double dielectric distributed Bragg reflector design was realized by substrate removal using electrochemical etching. Our method is further extendable to even shorter wavelengths, which would establish a technology that enables VCSEL emission from UVA (320–400 nm) to UVC (<280 nm).

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confidence: 99%

A 310 nm Optically Pumped AlGaN Vertical-Cavity Surface-Emitting Laser

et al. 2020

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“…In previous papers, we demonstrated the use of NP GaN as DBR mirrors for III-nitride VCSELs. , When designing NP DBR-based structures, it is common to treat the NP layer as a homogeneous “nanocomposite” with a tunable refractive index ( n eff ) based on the effective index model . While this simplification allows knowledge and designs developed for DBRs consisting of homogeneous layers to be seamlessly transferred to NP DBRs, it overlooks potentially interesting, subwavelength features generated by the nanopores morphology.…”

Section: Physical Modelmentioning

confidence: 99%

Study and Application of Birefringent Nanoporous GaN in the Polarization Control of Blue Vertical-Cavity Surface-Emitting Lasers

ElAfandy

Kang

et al. 2021

ACS Photonics

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III-Nitride vertical-cavity surface-emitting lasers (VCSELs) have attracted much attention during the last two decades. Control of the laser polarization in VCSELs is one of the main challenges that needs to be addressed for real applications. In this work a novel polarization locking technique for GaN VCSELs is presented by employing birefringent nanoporous distributed Bragg reflectors (DBRs). The birefringence arises from a nanophotonic effect of evanescent field enhancement in the anisotropically aligned nanopores. Furthermore, the birefringence dependence over the nanopores morphology is explored. A fully electrically injected blue VCSEL with polarization locking is demonstrated. As presented, this technique allows to individually define the polarization angle in a planar array, opening the path to novel applications.

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“…Therefore, the cavity design and fabrication of UV VCSELs will be even more critical than that of long-wavelength VCSELs. UV VCSELs can be used as an alternative component in an atomic clock, UV resin-curing, gas sensing, and disinfections [107][108][109].…”

Section: Outlook Of Iii-nitride Vcsel Researchmentioning

confidence: 99%

Challenges and Advancement of Blue III-Nitride Vertical-Cavity Surface-Emitting Lasers

et al. 2021

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Since the first demonstration of (Al, In, Ga)N-based blue vertical-cavity surface-emitting lasers (VCSELs) in 2008, the maximum output power (Pmax) and threshold current density (Jth) has been improved significantly after a decade of technology advancements. This article reviewed the key challenges for the realization of VCSELs with III-nitride materials, such as inherent polarization effects, difficulties in distributed Bragg’s reflectors (DBR) fabrication for a resonant cavity, and the anti-guiding effect due to the deposited dielectrics current aperture. The significant tensile strain between AlN and GaN hampered the intuitive cavity design with two epitaxial DBRs from arsenide-based VCSELs. Therefore, many alternative cavity structures and processing technologies were developed; for example, lattice-matched AlInN/GaN DBR, nano-porous DBR, or double dielectric DBRs via various overgrowth or film transfer processing strategies. The anti-guiding effect was overcome by integrating a fully planar or slightly convex DBR as one of the reflectors. Special designs to limit the emission polarization in a circular aperture were also summarized. Growing VCSELs on low-symmetry non-polar and semipolar planes discriminates the optical gain along different crystal orientations. A deliberately designed high-contrast grating could differentiate the reflectivity between the transverse-electric field and transverse-magnetic field, which restricts the lasing mode to be the one with the higher reflectivity. In the future, the III-nitride based VCSEL shall keep advancing in total power, applicable spectral region, and ultra-low threshold pumping density with the novel device structure design and processing technologies.

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Development of nanopore-based near ultraviolet vertical-cavity surface emitting lasers

Cited by 5 publications

References 34 publications

A 310 nm Optically Pumped AlGaN Vertical-Cavity Surface-Emitting Laser

A 310 nm Optically Pumped AlGaN Vertical-Cavity Surface-Emitting Laser

Study and Application of Birefringent Nanoporous GaN in the Polarization Control of Blue Vertical-Cavity Surface-Emitting Lasers

Challenges and Advancement of Blue III-Nitride Vertical-Cavity Surface-Emitting Lasers

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