2000
DOI: 10.1117/12.380905
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Development of NCLR's 1-kW XeCl laser

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Cited by 4 publications
(3 citation statements)
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“…Nanosecond laser pulses with a short wavelength are highly suitable for processing of various types of material [1,2], mainly as a result of a higher absorption by the material and a lower absorption by the plume [3,4]. A novel 1 kW XeCl excimer laser (λ = 308 nm) with 1 J pulse energy and 1000 Hz repetition rate has been developed by NCLR [5]. A unique feature of this laser is the nearly diffraction-limited beam [6], which originates from the long optical pulse length u Fax: +31-53/489-1102, E-mail: a.schoonderbeek@utwente.nl (about 175 ns) and enables the use of the entire beam instead of using mask projection techniques.…”
Section: Introductionmentioning
confidence: 99%
“…Nanosecond laser pulses with a short wavelength are highly suitable for processing of various types of material [1,2], mainly as a result of a higher absorption by the material and a lower absorption by the plume [3,4]. A novel 1 kW XeCl excimer laser (λ = 308 nm) with 1 J pulse energy and 1000 Hz repetition rate has been developed by NCLR [5]. A unique feature of this laser is the nearly diffraction-limited beam [6], which originates from the long optical pulse length u Fax: +31-53/489-1102, E-mail: a.schoonderbeek@utwente.nl (about 175 ns) and enables the use of the entire beam instead of using mask projection techniques.…”
Section: Introductionmentioning
confidence: 99%
“…A novel 1 kW XeCl excimer laser ͑ϭ308 nm͒ with a pulse energy of 1 J and a repetition rate of 1000 Hz has been developed by Nederlands Centrum voor Laser Research. 3 A unique feature of this excimer laser is its excellent beam quality, 4 which is nearly diffraction limited. This excellent beam quality originates from the long optical pulse length and enables usage of the entire beam instead of using mask projection techniques.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore the average power of this laser is 1 kW. 1 Special are the long optical pulse length of 150 to 200 ns and the excellent beam quality (nearly diffraction limited). 2 The latter enables focussing of the entire beam without using mask projection techniques.…”
Section: Introductionmentioning
confidence: 99%