1992
DOI: 10.1143/jjap.31.3518
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Development of New a-Si/c-Si Heterojunction Solar Cells: ACJ-HIT (Artificially Constructed Junction-Heterojunction with Intrinsic Thin-Layer)

Abstract: A new type of a-Si/c-Si heterojunction solar cell, called the HIT (Heterojunction with Intrinsic Thin-layer) solar cell, has been developed based on ACJ (Artificially Constructed Junction) technology. A conversion efficiency of more than 18% has been achieved, which is the highest ever value for solar cells in which the junction was fabricated at a low temperature (<200°C).

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Cited by 536 publications
(321 citation statements)
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“…The quality of the as-deposited surface passivation on the phosphorus diffusion improves dramatically with a-Si:H(i) thickness and appears to saturate in the 6-8 nm range, consistent with open circuit voltage V oc trends for SHJ solar cells reported in the literature. 19 Beyond these thicknesses excellent passivation is achieved, producing recombination parameters even lower (by about 10 fA/cm 2 ) than the PECVD a-SiN x :H controls listed in Table I, inferring that this value is a more appropriate upper-limit representation of recombination within the bulk of the phosphorus diffusion. An alike sample (not shown) deposited with $30 nm of a-Si:H(i) produces an identical J 0c to that at 10 nm confirming that the passivation is saturated.…”
Section: A Interface Passivationmentioning
confidence: 95%
“…The quality of the as-deposited surface passivation on the phosphorus diffusion improves dramatically with a-Si:H(i) thickness and appears to saturate in the 6-8 nm range, consistent with open circuit voltage V oc trends for SHJ solar cells reported in the literature. 19 Beyond these thicknesses excellent passivation is achieved, producing recombination parameters even lower (by about 10 fA/cm 2 ) than the PECVD a-SiN x :H controls listed in Table I, inferring that this value is a more appropriate upper-limit representation of recombination within the bulk of the phosphorus diffusion. An alike sample (not shown) deposited with $30 nm of a-Si:H(i) produces an identical J 0c to that at 10 nm confirming that the passivation is saturated.…”
Section: A Interface Passivationmentioning
confidence: 95%
“…With stacks of intrinsic and doped a-Si:H layers, excellent surface passivation can be achieved, leading to high open-circuit voltages in excess of 720 mV. 1,2 The drawback of the amorphous emitter is its low mobility, which, together with a thickness limited to a few nanometers to reduce light absorption losses, 3,4 results in a high resistivity. To overcome this disadvantage and achieve high efficiencies, a transparent conductive oxide (TCO) layer is required on top of the emitter for lateral transport of photogenerated charge carriers to metal finger contacts; the TCO also serves as a single-layer antireflection coating.…”
Section: Introductionmentioning
confidence: 99%
“…[5][6][7] For this reason, typically, a few nanometer thin intrinsic buffer layer is inserted between the c-Si surface and the doped a-Si: H films for device fabrication. 8 For HJ solar cells featuring such stacked film structures, impressive large area ͑Ͼ100 cm 2 ͒ energy conversion efficiencies ͑Ͼ22%͒ have been reported. 9,10 Despite this result, the fundamental origin of the poor passivation of the doped a-Si: H / c-Si interface is not yet fully understood.…”
Section: Introductionmentioning
confidence: 99%