Development of new electrostatic micro cam system driven by elastic wings

Influence of the driving frequency and equivalent parameters on displacement amplitude of electrostatic linear comb actuator

“…Material properties of the silicon [4,10] and air are listed in Table 2: The conversion coefficients in differential equation ( 4) calculated by equations ( 2), ( 7) and ( 11) are shown in Table 3: The ELCA's simulation is implemented by using a finite element method (FEM) in ANSYS. At driving voltage of 100V, the maximum stress on suspension beams is 28.2MPa and the obtained displacement y of the shuttle is 38.42µm, as shown in Fig.…”

“…The total stiffness in y-direction of four suspension beams system can be calculated as [4,10]: While applying a voltage V between anchor pads 2 and fixed electrodes 3 of the ELCA, the total electrostatic force in y-direction is expressed as follows…”

“…where n is a total number of the movable comb fingers; ε 0 = 8.854×10 −6 pF/µm and ε = 1 are permittivity of vacuum and air, respectively; V is the driving voltage. The total stiffness in y-direction of four suspension beams system can be calculated as [4,10]…”

“…The advantages of the ELCA system are fast response, high performance, low energy consumption, and simple configuration. That is the reason why it is commonly used for driving MEMS devices, such as resonators [1], gyroscopes [2], micro conveyer/transportation systems [3], micro motor [4], or micro gripper [5]. Recently, there are many researches on the ELCA in various aspects.…”

“…When calculating the displacement of the ELCA in design task [3,4,[10][11][12], the authors used the theoretical formula which is established based on static equilibrium equation, aiming simplifies computing and reduces a design time. In fact, these devices work in state of motion though applying AC voltage likes a square or sine wave, etc.…”