1995
DOI: 10.1149/1.2044299
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Development of Nitrogen Gas Bubbling Deaerator Made of Polyvinyliden Fluoride

Abstract: It is essentially important to remove the dissolved oxygen (DO) in the ultrapure water for the future ultralarge scale integration (ULSI). We have found the existence of the big driving force for the oxygen diffusion through tube materials that increases the DO concentration. The DO concentration through the perfluoro alkoxide (PFA) tube rapidly increased with decreasing the flow rate of the ultrapure water. On the other hand, the DO concentration through the polyvinyliden fluoride (PVDF) tube that is a low ox… Show more

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Cited by 5 publications
(3 citation statements)
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“…The dynamical behavior of the EMF can be caused by the time dependence of the 2nd term in eq. (14). The rate determining process in high O 2 region, however, will be due to the diffusion process of the recombined O 2 molecule on/nearby the sample Pt à electrode, because the recombined O 2 does not dissolve in the electrolyte easily under the saturation state of O 2 nearby the sample Pt à electrode.…”
Section: Experimental Analysis and Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…The dynamical behavior of the EMF can be caused by the time dependence of the 2nd term in eq. (14). The rate determining process in high O 2 region, however, will be due to the diffusion process of the recombined O 2 molecule on/nearby the sample Pt à electrode, because the recombined O 2 does not dissolve in the electrolyte easily under the saturation state of O 2 nearby the sample Pt à electrode.…”
Section: Experimental Analysis and Discussionmentioning
confidence: 99%
“…The gas control technology and the clean technology were * Graduate Student, Niigata University referred to the gas bubbling method. 14) This cell was made of a PYREX Ò glass with leak tightness. The dissolved oxygen in the electrolyte was removed by 10 À3 m 3 /min Ar gas bubbling for 8 h. The leakage of air into the cell was prevented by Ar continuous purging.…”
Section: Methodsmentioning
confidence: 99%
“…This means that our electroless plating technique conferred the same effect as the removal of the DO by the nitrogen gas bubbling method. [22][23][24][25] Thus, the DO was removed in the dispersed sc-CO 2 phase of the emulsion and reduced the influence of the DO.…”
Section: Relationship Between Surface Features and Reaction Time-figurementioning
confidence: 99%