2010
DOI: 10.1016/j.sna.2009.12.021
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Development of piezoelectric acoustic sensor with frequency selectivity for artificial cochlea

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Cited by 113 publications
(136 citation statements)
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“…The prototype piezoelectric device was fabricated as previously described (18). A thin aluminum film was formed on both sides of the 40-μm-thick PVDF membrane by sputtering.…”
Section: Methodsmentioning
confidence: 99%
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“…The prototype piezoelectric device was fabricated as previously described (18). A thin aluminum film was formed on both sides of the 40-μm-thick PVDF membrane by sputtering.…”
Section: Methodsmentioning
confidence: 99%
“…2A) containing a PVDF membrane (40-μm thickness) was fabricated using microelectromechanical systems as described previously (18). The piezoelectric membrane was used as a transducer, and its electrical outputs were amplified by 1,000-fold.…”
Section: Generation Of Abrs By a Piezoelectric Device In Living Guinementioning
confidence: 99%
See 1 more Smart Citation
“…Tanaka et al [3] and Xu et al [4] developed acoustic sensors with the function of frequency selectivity by the use of resonance of cantilever arrays. Ito et al [5] developed a PVDF piezoelectric artificial cochlea which worked as a sensor with the acoustic/electric conversion and with the frequency selectivity based on MEMS technology. In this paper, we studied the feasibility of single crystal PMN-PT piezoelectric cantilever array as an alternative for basilar membrane and mechanosensitive ion channel of cochlea.…”
Section: Introductionmentioning
confidence: 99%
“…近年来, 人们已经在可穿戴可植入传感器领域取 得了显著进步, 例如利用电子皮肤向大脑传递皮肤触觉 信息 [2] , 利用三维微电极实现大脑皮层控制假肢 [3] , 利 用人工耳蜗恢复病人听力等 [4] . 然而, 实现柔性可穿戴 电子传感器的高分辨、高灵敏、快速响应、低成本制造 和复杂信号检测仍然是一个很大的挑战 [5] .…”
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