Development of piezoelectric micromachined ultrasonic transducers

Akasheh, Firas; Myers, Todd; Fraser, John D.; Bose, Susmita; Bandyopadhyay, Amit

doi:10.1016/j.sna.2003.11.022

Cited by 225 publications

(124 citation statements)

References 19 publications

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“…Flexural transducers share many traits with the more recently developed piezoelectric micromachined ultrasonic transducers (pMUTs) [28], which combine the enhanced fluid coupling of flextensional vibrations of a plate with micro electromechanical systems (MEMS) technology. In essence, a pMUT is an array of miniaturised flexural transducers operating in the fundamental bending mode.…”

Section: Introductionmentioning

confidence: 99%

Experimental and simulation characterisation of flexural vibration modes in unimorph ultrasound transducers

2016

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Abstract-Two unimorph flexural transducer designs are proposed and tested with regard to mode shapes and frequencies. The transducers consist of a passive metal cap structure, and a thin piezoelectric disc rigidly bonded to the inside. Extensive finite element modelling, and experimental 2D, time-resolved displacement measurements were done to characterise the transducers flexural properties, and to compare them to the analytical solutions of thin vibrating plates. Emphasis was put on characterising the passive layer of the unimorph structure, before bonding the piezoelectric element, to understand how the active element affects the behaviour of the flexing plate. A high power Nd:YAG laser was used to actuate the metal plate (non-contact), and the frequency content of the resulting displacement signal was analysed to identify the flexural modes. The non-axisymmetric modes, which are conventionally disregarded because of their unfavourable acoustic properties, were also taken into account. There was excellent agreement between the experimental results and the FE simulation data. There was good agreement with the analytical edge clamped plate model, but with some notable deviations, which have not previously been identified or commented upon. Specifically, the second axisymmetric mode is split into three separate modes, which is not explained by the traditional theory of plates. The analysis is similar to that of contemporary pMUT research, but with the proposed macroscopic dimensions and passive metal layer making the transducer industrially robust, cheap and easy to manufacture, and more suitable for a different range of applications where these aspects are of importance.

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Section: Introductionmentioning

confidence: 99%

Experimental and simulation characterisation of flexural vibration modes in unimorph ultrasound transducers

2016

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“…The 30-nm SrTiO 3 (STO) buffer-layer on the Si-substrate of the Epi(001) device was deposited by molecular beam evaporation (MBE). 21 The textured PZT films in the SG(001) devices were prepared by a sol-gel technique, where a PZT precursor solution was prepared from lead acetate (Pb[OAc] 2 · 3H 2 O), titanium iso-propoxide (Ti[i-OPr] 4 and zirconium n-propoxide (Zr[n-OPr] 4 in 2-methoxyethanol solvent. The 0.4 M PZT precursor with 10 mol.% excess lead content in solutions was prepared and spin coated on Pt/Ti/SiO 2 /Si wafers at 4000 rpm for 30 seconds, followed by pyrolysis at 400 C for 10 min.…”

Section: Methodsmentioning

confidence: 99%

A Fast Room-Temperature Poling Process of Piezoelectric Pb(Zr0.45Ti0.55)O3 Thin Films

Nguyen¹,

Houwman²,

Dekkers³

et al. 2014

sci adv mat

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The effect of two poling processes on the ferroelectric and piezoelectric properties of sol-gel and pulsedlaser-deposited Pb(Zr 0 45 Ti 0 55 )O 3 (PZT) thin films has been investigated as a function of the poling field, poling temperature and poling time. In the case of dc-electric field poling at an elevated temperature (200 C), the remnant polarization and effective piezoelectric coefficient are found to increase with and saturate at high dc-poling field (400 kV/cm) and long poling time (30 minutes). The room-temperature poling process using acelectric field poling, shows the same trend with poling field but much shorter poling times (100 seconds), with only a slightly lower saturation value of polarization. It is suggested that in room-temperature poling screening charges are merely rearranged, whereas in high temperature poling these charges are largely removed. A much larger improvement in the properties of sol-gel PZT thin films is found, as compared to those deposited using pulsed laser deposition (PLD), indicating that a poling process is required for sol-gel films.

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“…In these cases, it is not practical to produce thick PZT films using standard sol-gel techniques, because of the increased cracking risk due to shrinkage nor is it desirable to produce thick films by a repetitive single layer deposition process due to the time required (Barrow et al, 1995;Zhou et al, 2000). The interest in ferroelectric lead zirconate titanate thick films for device applications, including high-frequency ferroelectric sonar transducers (Bernstein et al, 1997), microelectromechanical system devices (Polla & Schiller, 1995;Myers et al, 2003;(Akasheh et al, 2004), elastic surface wave devices (Cicco et al, 1996), hydrophones (Chan et al, 1999) and sensors (Xia et al, 2001), has increased in the last decades because PZT ferroelectric thick films possess the merits of both bulk and thin film materials (Barrow et al, 1997;Ledermann et al, 2003). PZT thick films devices not only work at low voltage and high frequency, as they are compatible with semiconductor integrated circuit, but also possess superior electric properties approaching near-bulk values.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Thick Films: Preparation and Characterization

Cruz¹

2012

Microelectromechanical Systems and Devices

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Development of piezoelectric micromachined ultrasonic transducers

Cited by 225 publications

References 19 publications

Experimental and simulation characterisation of flexural vibration modes in unimorph ultrasound transducers

Experimental and simulation characterisation of flexural vibration modes in unimorph ultrasound transducers

A Fast Room-Temperature Poling Process of Piezoelectric Pb(Zr<SUB>0</SUB><SUB>.45</SUB>Ti<SUB>0</SUB><SUB>.55</SUB>)O<SUB>3</SUB> Thin Films

Piezoelectric Thick Films: Preparation and Characterization

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