Development of Piezoelectric One Port Contour-Mode Microelectromechanical System Resonator for Biomedical Mass/Pressure Sensing Application

Abstract

This paper presents zinc oxide one port contour-mode machined resonator operated under global system for mobile communication range of frequency. TheS11 value of –38.57 dB at resonance frequency of 882 MHz in average was observed. The phase shift of the device and voltage standing wave ratio were noted as 115° and 1.18 respectively, sufficiently adopted for radio frequency communication. The device has been optimized for 21 aluminum interdigited fingers patterned over zinc oxide thin film. Two electron beam and two optical lithography were processed for fabricating the devices. Our findings are expected to provide effective approach for realizing efficient biocompatible detector for biomedical mass/pressure sensing application.