Development of precision stage with magnified displacement system using multi reflection of optical sensor

Ha, Yang; Lee, Sang Min; Lee, Seung Joon; Choi, Soo Chang; Lee, Deug Woo

doi:10.1007/s12541-013-0062-6

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Cited by 3 publications

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“…The premise for precision motion control is to build a set of precise displacement measuring systems. In the field of precise position measurement, laser heterodyne interference measurement (Figure 1(b)) is widely applied owing to its rapid response, wide measuring scale, high signal-to-noise, ability to overcome directional fuzziness, and without interference from light intensity variation [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Design of Precise Synchrone Mechanism in Multiaxial Laser Measurement

Zhou

Liu

Zhou

et al. 2014

Advances in Mechanical Engineering

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Precision measurement is the premise of precision motion control. When a worktable is operating, the synchronization of multiaxial sampling will directly affect the precision of table position conversion. In this paper, a precise synchrone mechanism for multiaxial laser measurement was proposed. Tests showed that the maximum synchronous sampling time error from 6 laser axes was 0.404 ns. When the table was moving at 1 m/s, the induced maximum displacement conversion error was 0.202 nm, which satisfied the strict nanometer-scale requirement imposed by ultra-precise motion control for position measurement.

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Section: Introductionmentioning

confidence: 99%