Development of serial-connection piezoelectric pumps

Kan, Junwu; Tang, Kehong; Liu, Guojun; Zhu, Guchuan; Shao, Changzheng

doi:10.1016/j.sna.2008.01.016

Cited by 73 publications

(55 citation statements)

References 27 publications

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“…The comparison between the experimental and simulated results shows a good agreement. A qualitative validation of the results obtained is provided by Junwu Kan 00007-p.8 EMM-FM2011 [4,7]. Finally, validation of the extended model was performed; we notice that the small difference between measurement and simulation results originates from the dynamic of the valve in the working middle.…”

Section: Discussionmentioning

confidence: 88%

“…For the serial-connection multi-chamber piezoelectric micropumps (SCMCP) [7], the working principle of the diaphragm pump can be described as a periodic process. The output performance is 00007-p.3 equivalent to that of some single-chamber piezoelectric micropump (SCP) operating in series.…”

Section: Analytical Model Of Chamber Diaphragmmentioning

confidence: 99%

“…(22) 00007-p. 4 The mathematical model for piezostak pump was used as a base [4]. Piezostack micropumps have been studied in experiments [4,7] and few in simulation. A model that captures the complicated dynamics amenable to control design is important for applying advanced control algorithms to deliver accurate and consistent flow rates for different application.…”

Section: Performance Of the Frequency-dependent Flow Ratementioning

confidence: 99%

“…Recently, a maximum flow rate of 1260 µL/min has been acheived for a polypyrroleactuated micropump under an actuation voltage of 4V [8]. The model is so tested on the serial-connection multi-chamber piezoelectric micropumps (Fig.1) [7] whose the piezoelectric diaphragm actuators (PZT alloy as actuators) work in anti-phase, consequently, the output performance is equal to that of several single chamber piezoelectric micropump. This one permits to reach the compromise solution (high flow/low actuation voltage).…”

Section: Performance Of the Frequency-dependent Flow Ratementioning

confidence: 99%

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Performances analysis of a piezo-pump

Amami

Belkhiat

2012

EPJ Web of Conferences

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Abstract. : Piezo-pumps, in the last decade, have received extensive attention because of their potential applications in biomedical devices, biological and chemical analysis, micro-electronics cooling and space exploration. In this paper an analytical model is developed to analysis the parameters effect on the pump flow. The micro-pump driven by piezostack (PZT alloy multilayer) as actuator is studied as function size and working middle. This one is compared with SCMCP pump actuated by PZT alloy as piezomembrane.The flow change as a function frequency, the chamber diameter and control voltage are analyzed. The simulation results obtained with two different liquids (water and blood) as working middle are discussed and compared with experimental results. The results are satisfactory.

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Section: Discussionmentioning

confidence: 88%

Section: Analytical Model Of Chamber Diaphragmmentioning

confidence: 99%

Section: Performance Of the Frequency-dependent Flow Ratementioning

confidence: 99%

Section: Performance Of the Frequency-dependent Flow Ratementioning

confidence: 99%

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Performances analysis of a piezo-pump

Amami

Belkhiat

2012

EPJ Web of Conferences

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“…The piezoelectric actuators are mounted on top of the membranes and ensure a maximum positive and negative displacement of the membranes. The volume change under the pump-membrane defines the volume flow per cycle [8][9][10].…”

Section: Working Principlementioning

confidence: 99%

A New Concept of a Drug Delivery System with Improved Precision and Patient Safety Features

2014

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This paper presents a novel dosing concept for drug delivery based on a peristaltic piezo-electrically actuated micro membrane pump. The design of the silicon micropump itself is straight-forward, using two piezoelectrically actuated membrane valves as inlet and outlet, and a pump chamber with a piezoelectrically actuated pump membrane in-between. To achieve a precise dosing, this micropump is used to fill a metering unit placed at its outlet. In the final design this metering unit will be made from a piezoelectrically actuated inlet valve, a storage chamber with an elastic cover membrane and a piezoelectrically actuated outlet valve, which are connected in series. During a dosing cycle the metering unit is used to adjust the drug volume to be dispensed before delivery and to control the actually dispensed volume. To simulate the new drug delivery concept, a lumped parameter model has been developed to find the decisive design parameters. With the knowledge taken from the model a drug delivery system is designed that includes a silicon micro pump and, in a first step, a silicon chip with the storage chamber and two commercial microvalves as a metering unit. The lumped parameter model is capable to simulate the maximum flow, the frequency response created by the micropump, and also the delivered volume of the drug delivery system.

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No‐Heating Deposition of 1‐μm‐Thick Y‐Doped HfO₂ Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method

Shimura

Mimura

Tateyama

et al. 2022

Physica Rapid Research Ltrs

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Y‐doped HfO2 ferroelectric films of ≈1 μm thick are deposited without heating by a radio frequency magnetron sputtering method. {100}‐oriented epitaxial films with orthorhombic phase are grown on (100)ITO//(100)YSZ substrates without heating. Their crystal structure is almost unchanged after postheat treatment at 800 °C. Ferroelectricity is confirmed for the no‐heating‐deposited films by polarization−electric field (P−E) curves, and their remanent polarization (Pr) and coercive fields are 12 μC cm−2 and 1.5 MV cm−1, respectively. These values are also almost unchanged after the postheat treatment. However, the postheat‐treated films show a lower breakdown electric field compared to the as‐deposited films without heat treatment. Approximately 1 μm‐thick films are also prepared without heating on (111)ITO/(111)Pt/TiOx/SiO2/(100)Si and (111)Pt/TiOx/SiO2/(100)Si substrates. Almost pure orthorhombic/tetragonal phase is deposited on both substrates without heating. The Pr value of the film on the (111)ITO/(111)Pt/TiOx/SiO2/(100)Si substrate is about 1.5 times larger than that on the (111)Pt/TiOx/SiO2/(100)Si substrate due to the better crystallinity of the film lattice‐matched with the underlying ITO layer. The effective piezoelectric constant (d33,f) of the film deposited on the (111)ITO/(111)Pt/TiOx/SiO2/(100)Si substrate without heating is estimated to be 4 pm V−1. The present low process temperature leads us to expect novel applications, especially for low‐heat‐resistance applications.

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Development of serial-connection piezoelectric pumps

Cited by 73 publications

References 27 publications

Performances analysis of a piezo-pump

Performances analysis of a piezo-pump

A New Concept of a Drug Delivery System with Improved Precision and Patient Safety Features

No‐Heating Deposition of 1‐μm‐Thick Y‐Doped HfO₂ Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method

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Development of serial-connection piezoelectric pumps

Cited by 73 publications

References 27 publications

Performances analysis of a piezo-pump

Performances analysis of a piezo-pump

A New Concept of a Drug Delivery System with Improved Precision and Patient Safety Features

No‐Heating Deposition of 1‐μm‐Thick Y‐Doped HfO2 Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method

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Product

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No‐Heating Deposition of 1‐μm‐Thick Y‐Doped HfO₂ Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method