Development of three-electrode type micro-electrochemical reactor on anodized aluminum with photon rupture and electrochemistry

Abstract

Photon rupture with a focused single pulse of pulsed YAG-laser irradiation was used to fabricate an aluminum electrochemical micro-reactor. Porous type anodic oxide film formed on aluminum specimens was irradiated in solutions with a pulsed Nd-YAG laser beam through a convex lens to fabricate micro channels, micro-electrode, and through holes (for reference electrode, solution inlet, and outlet). During irradiation, specimens were moved by a computer controlled XYZ stage. After irradiation, the surface of the micro-channel and through hole were again treated to form anodic oxide film and the surface of the micro-electrode was treated electrochemically to provide an Au layer. The calculated volume of the micro-reactor including micro-channel and through holes is about 1.5 µl. The cyclic voltammogram of the micro-electrochemical cell was measured in K 3 Fe(CN) 6 / K 4 Fe(CN) 6 with both static and flowing solution at different scanning rates. The anodic and cathodic peak currents were measured and the values depended on scanning rate and ion concentration when the solution was static. With the flowing solution, limiting currents were observed and the anodic limiting current was increased with the cubic root of the solution flow rate.

Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution

“…1). After the laser irradiation, subsequently electro-and electro-less plating caused a selective metal and organic compound deposition on the exposed aluminum substrate, and microstructure fabrication such as micro-coils [8][9][10][11], printed circuit boards [12][13][14], plastic injection molds [15], three-dimensional (3D) complicated micromachine components [16,17], 3D micro-actuators [18,19], and electrochemical micro-reactors [20], was successfully achieved.…”

Electrolysis of pure water in a thin layer cell

“…Electrolysis voltage at segmented electrodes has been controlled locally to a diffusion-limited value [12]. Although reaction potential cannot be poorly controlled in conventional, synthetic cells, micro-reactors have made it possible to obtain cyclic voltammograms [13]. Microfluidic channel flow devices have been fabricated for in situ simultaneous hydrodynamic electrochemical ESR, resulting in minimal dielectric loss and a high level of sensitivity [14,15].…”

Wet/Dry Cycle Corrosion Behavior of Model Cut-Edge Formed on Pre-Painted Zinc Alloy Coated Steels by Laser Fabrication

“…It has been reported that fabrication of a three-dimensional micro-manipulator and micro-reactor by laser irradiation and electrochemical techniques (11)(12)(13). This technique allows us to form burr free edges and control S r .…”