Development status of a 193-nm immersion exposure tool

Chibana, Takahito; Nakano, Hitoshi; Hata, Hideo; Kodachi, Nobuhiro; Sano, Naoto; Arakawa, Mikio; Matsuoka, Yuichiro; Kawasaki, Youji; Mori, Sunao; Chiba, Keiko

doi:10.1117/12.657010

Cited by 2 publications

(1 citation statement)

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“…The general process of photolithography is shown in Figure 3 . Photolithography can be further divided into three types: excimer lithography, extreme ultraviolet lithography, and electron beam lithography [ 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 ]. Excimer lithography usually relies on the 193 nm ArF immersion technology.…”

Section: The Manufacturing Of Microrobotsmentioning

confidence: 99%

Acoustics-Actuated Microrobots

et al. 2022

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Microrobots can operate in tiny areas that traditional bulk robots cannot reach. The combination of acoustic actuation with microrobots extensively expands the application areas of microrobots due to their desirable miniaturization, flexibility, and biocompatibility features. Herein, an overview of the research and development of acoustics-actuated microrobots is provided. We first introduce the currently established manufacturing methods (3D printing and photolithography). Then, according to their different working principles, we divide acoustics-actuated microrobots into three categories including bubble propulsion, sharp-edge propulsion, and in-situ microrotor. Next, we summarize their established applications from targeted drug delivery to microfluidics operation to microsurgery. Finally, we illustrate current challenges and future perspectives to guide research in this field. This work not only gives a comprehensive overview of the latest technology of acoustics-actuated microrobots, but also provides an in-depth understanding of acoustic actuation for inspiring the next generation of advanced robotic devices.

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