Alternative means of delivering drugs such as insulin to patients sometimes include the usage of high voltage pulsing or electrical current. However, such systems are limited by their ability to push drugs across the stratum corneum at therapeutic rates. One promising solution could be the usage of a micron scale needle, to create micropores in the skin which can allow faster diffusion of drugs with greater molecular weight or polarity into the human body. In combination with a transdermal patch, an array of micro-needles can be created to enhance the intake of drugs as well. With rapid advancement in MEMS (Micro Electro Mechanical Systems), silicon micromachining had enabled the development of such devices and result in various micro-needle designs to date. In addition, micro-needles had been fabricated with the inclusion of a fluid channel along the structure to allow controlled diffusion rates. However, the steps in fabricating such structures are often complex which lowers the process reliability and repeatability. By further proposing certain fabrication protocols and improvising on the design of micro-needles, the process can be made simpler and result in more efficient manufacturing routes. An extensive study by researchers have revealed certain requirements of the microneedle during drug injection, various fabrication techniques for different kind of materials as well as the possibilities of mass manufacturing processes. These areas are widely investigated and a particular area of study uses the soft lithography techniques in fabricating polymeric micro-needles. This requires the fabrication of a master mold either from silicon or commonly nickel. The research focus in this report is devoted to fabricating an array of silicon micro-needles which can double as usages for direct drug applications or as master molds for soft molding. A novel, multiple-sacrificial approach has been demonstrated as suited to the fabrication of at least 150um long micro-needle bodies with positive profiles. By changing the mask design for base diameters from 90um to 240um, the needle profile can be engineered to give a suitable tip size for penetration, as well as a broad needle base to facilitate the creation of either single or multiple-through holes. This approach allows the mechanical properties of the otherwise brittle needles to be optimized up to buckling loads of 28mN. In i ATTENTION: The Singapore Copyright Act applies to the use of this document. Nanyang Technological University Library comparison, silicon micro-needles had also been tested to be painless which is consistent with literature review and capable of skin penetration. Based on the experimental investigations and finite element simulations presented in this report, the objectives of creating and utilizing silicon microneedles had been met and various future work proposed. These include soft lithography on silicon microneedles, in vitro testing on humans, rats and porcine skin samples for feasibility of silicon micro-needles and finite element modeling of mi...