1996
DOI: 10.1007/bf02744783
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Developments in nuclear techniques for hydrogen depth profiling

Abstract: ~bstraet, Hydrogen plays a crucial roIe in the properties of various materials, devices and in growth of hydrogenated amorphous materials. Therefore, its quantification and determination of concentration at various depths is of immense interest. Among various techniques of hydrogen depth profiling, the nuclear techniques being non-destructive in nature are widely used. Elastic recoil detection analysis (ERDA) with helium ions was first used for hydrogen depth profiling. Later on, the heavy ions were utilised d… Show more

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Cited by 6 publications
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