Developments of DUV coating technologies in CIOMP

Li-chao, 张立超 Zhang; Jin-song, 高劲松 Gao

doi:10.3788/ope.20122011.2395

光学精密工程

2012

DOI: 10.3788/ope.20122011.2395

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Developments of DUV coating technologies in CIOMP

张立超 Zhang Li-chao

高劲松 Gao Jin-song²

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A New Profile Measurement Method for Thin Film Surface

Liu¹,

Zhang²,

Zhang³

2015

TOAUTOCJ

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In order to measure the surface profile of the thin films in wide area with high accuracy, the research on the new measurement method was conducted and many patents on measurement method and system were researched. Based on the physical properties of soft thin film, the method of using white interferometer and ball cantilevers for measuring the surface profile of thin film is proposed. Then, the multi-ball-cantilever AFM system using a multi-ball-cantilever is developed that had 8 cantilevers in 2 mm and each cantilever had the ball stylus with diameter of 10.9 µm. Using this system, the measurement experiments on the step and transparent material was conducted. The results on the step that the precision of the system's measuring error is less than 2% and the measuring standard deviation is less than 1 nm. The result on the step indicated that it is possible to measure the surface with high accuracy. The result on the transparent material showed the feasibility for measuring the thin film by this developed system.

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A New Profile Measurement Method for Thin Film Surface

Liu¹,

Zhang²,

Zhang³

2015

TOAUTOCJ

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深紫外高陡度滤光膜的研制

Cai Yuanhao,

Fu Xiuhua,

Lin Zhaowen

et al. 2024

光学学报

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Developments of DUV coating technologies in CIOMP

Cited by 2 publications

References 0 publications

A New Profile Measurement Method for Thin Film Surface

A New Profile Measurement Method for Thin Film Surface

深紫外高陡度滤光膜的研制

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