2003
DOI: 10.1088/0268-1242/18/3/314
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Diamond-based surface acoustic wave devices

Abstract: Research and development have been carried out to apply the CVD diamond film to surface acoustic wave (SAW) devices. Several kinds of layered structures including a diamond layer have been investigated by the calculations and experiments, and it has been found that the diamond SAW has great advantages for the application of high-frequency SAW devices with high SAW velocity, small temperature coefficient and high power durability. Practical SAW devices have been successfully fabricated with ZnO/diamond/Si and S… Show more

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Cited by 61 publications
(40 citation statements)
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“…A well-established technique for the generation and detection of SAWs is to pattern interdigital transducers (IDTs) on a piezoelectric substrate. Highfrequency SAW devices have previously been fabricated on diamond [50]. For the samples used in our experiments, (a) Schematic of a Λ-type three-level system driven by two optical fields with respective Rabi frequency, Ω 1 and Ω 2 .…”
Section: A Generation Of Surface Acoustic Wavesmentioning
confidence: 99%
“…A well-established technique for the generation and detection of SAWs is to pattern interdigital transducers (IDTs) on a piezoelectric substrate. Highfrequency SAW devices have previously been fabricated on diamond [50]. For the samples used in our experiments, (a) Schematic of a Λ-type three-level system driven by two optical fields with respective Rabi frequency, Ω 1 and Ω 2 .…”
Section: A Generation Of Surface Acoustic Wavesmentioning
confidence: 99%
“…To excite a SAW, an oscillating voltage of frequency f SAW is applied to an interdigital transducer 3 (IDT) whose spacing determines the wavelength λ 0 , such that f SAW λ 0 = v SAW . The SAW velocity v SAW is in the range 1 − 7 km/s for commonly used single-crystal materials 1 but can reach 12 km/s for layered systems 4,5 . The IDT also works as a receiver, generating an oscillating voltage when a SAW of the right wavelength passes through it 1 .…”
Section: Introductionmentioning
confidence: 99%
“…We cool the devices down to a lowest temperature of 10 mK using a dilution refrigerator, and measure their frequency response using a vector network analyzer (VNA). We also perform two-contact electrical resistance measurements as a function of temperature on samples cut from the same ZnO wafer, using graphite paste for contacts, and a liquid 4 He dewar dipstick fitted with a Cernox thermometer.…”
Section: Introductionmentioning
confidence: 99%
“…Several methods have been proposed to overcome this problem [19]. Mechanical polishing of the diamond surface has been used for microcrystalline diamond (MCD) in order to solve it [20,21 ]. However, this procedure is expensive, time-consuming and not yet optimized for NCD.…”
Section: Introductionmentioning
confidence: 99%