Diamond CVD by microwave plasmas in argon-diluted methane without or with 2% hydrogen additive

Tzeng, Yonhua; Liu, Y.K.

doi:10.1016/j.diamond.2004.11.012

Cited by 18 publications

(13 citation statements)

References 7 publications

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“…Therefore, Raman spectrum is considered to be a powerful tool to potential tracking of nanodiamonds. The graphite phase can be removed with treatment at relatively lower temperatures in comparison to that of diamonds [44]. This can be seen clearly in the intensity reduction of the corresponding G band compared with that of diamonds.…”

Section: Introductionmentioning

confidence: 97%

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Raman Spectra of Nanodiamonds: New Treatment Procedure Directed for Improved Raman Signal Marker Detection

Nigmatullin

Băleanu

Povarova

et al. 2013

Mathematical Problems in Engineering

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Detonation nanodiamonds (NDs) have shown to be promising agents in several industries, ranging from electronic to biomedical applications. These NDs are characterized by small particle size ranging from 3 to 6 nm, while having a reactive surface and a stable inert core. Nanodiamonds can exhibit novel intrinsic properties such as fluorescence, high refractive index, and unique Raman signal making them very attractive imaging agents. In this work, we used several nanodiamond preparations for Raman spectroscopic studies. We exposed these nanodiamonds to increasing temperature treatments at constant heating rates (425–575°C) aiding graphite release. We wanted to correlate changes in the nanodiamond surface and properties with Raman signal which could be used as adetection marker. These observations would hold potential utility in biomedical imaging applications. First, the procedure of optimal linear smoothing was applied successfully to eliminate the high-frequency fluctuations and to extract the smoothed Raman spectra. After that we applied the secondary Fourier transform as the fitting function based on some significant set of frequencies. The remnant noise was described in terms of the beta-distribution function. We expect this data treatment to provide better results in biomolecule tracking using nanodiamond base Raman labeling.

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Section: Introductionmentioning

confidence: 97%

“…However, synthesized nanodiamonds contain considerable amount of graphite, which can be detected by Raman spectrum. The presence of a broad band at around 1590 cm −1 is the inplane vibrations of graphite (G band) [18,43,44]. Therefore, Raman spectrum is considered to be a powerful tool to potential tracking of nanodiamonds.…”

Section: Introductionmentioning

confidence: 99%

Raman Spectra of Nanodiamonds: New Treatment Procedure Directed for Improved Raman Signal Marker Detection

Nigmatullin

Băleanu

Povarova

et al. 2013

Mathematical Problems in Engineering

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“…In a MPCVD reactor, the common methods to obtain nanocrystalline diamond films include increasing the CH 4 ratio in a CH 4 -H 2 mixture, negatively biasing the substrate, adding Ar or N 2 to the feedstock gas, and increasing working pressure or the gas flow rate. [20][21][22][23][24] The present deposition conditions (30-torr working pressure, 1% CH 4 in H 2 , 100-sccm total flow rate, bias free) are considered to be suitable only for the fabrication of microcrystalline diamond films, and are generally unsuitable for nanocrystalline diamond growth, as has been confirmed by the test performed on virgin Si wafer and Si(C,N) interlayers. Consequently, it is of great interest to clarify the mechanism responsible for the transition from microcrystalline diamond films formed on Si(C,N) layers to nanocrystalline diamond films on TiSiN and TiAlSiN layers.…”

Section: Discussionmentioning

confidence: 74%

Diamond Growth on a Si Substrate With Ceramic Interlayers

Xiao

Hirose

et al. 2007

Journal of the American Ceramic Society

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Deposition of diamond films on Si substrates precoated with a series of ceramic intermediate layers was examined. The interlayers containing SiC, SiNx, SiCN, TiSiN, and TiAlSiN were prepared by a liquid injection plasma‐enhanced chemical vapor deposition (PECVD) method using alkoxide solution precursors. The subsequent diamond synthesis on these coatings was carried out by microwave plasma‐assisted CVD (MPCVD) using a H2–1%CH4 mixture. A higher nucleation density of diamond was obtained on these intermediate layers than on the as‐polished Si wafer, along with a nonuniform surface distribution of diamond. Diamond powder scratching pretreatment of these interlayers enhanced the nucleation density and promoted the formation of fully uniform diamond films. Particularly, nanocrystalline diamond films were directly generated on TiSiN and TiAlSiN layers under an identical deposition condition that had favored the formation of microcrystalline diamond films on Si wafers and the Si(C,N) interlayers. The mechanism for this difference is attributed primarily to a higher amount of residual amorphous carbon in TiSiN and TiAlSiN layers than that inside Si(C,N) layers.

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“…The unique properties of NCD extraordinarily enhance the applications of diamond in many potential fields such as structural layer material for micro-and nanoelectromechanical systems (MEMS/NEMS). Especially in recent years, the researches on NCD have been growing rapidly [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%