2011
DOI: 10.1016/j.mseb.2010.11.003
|View full text |Cite
|
Sign up to set email alerts
|

Diamond electrophoretic microchips—Joule heating effects

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
7
0

Year Published

2013
2013
2024
2024

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 10 publications
(7 citation statements)
references
References 12 publications
0
7
0
Order By: Relevance
“…Other diamond containing microfluidic devices have been reported, e.g. by Babchenko et al , who fabricated PDMS based microfluidic devices bonded with diamond films 28 , and Karczemska et al ., who produced diamond based microfluidic devices fabricated through photolithography and etching, with considerable fabrication complexity and cost 29 .…”
Section: Introductionmentioning
confidence: 99%
“…Other diamond containing microfluidic devices have been reported, e.g. by Babchenko et al , who fabricated PDMS based microfluidic devices bonded with diamond films 28 , and Karczemska et al ., who produced diamond based microfluidic devices fabricated through photolithography and etching, with considerable fabrication complexity and cost 29 .…”
Section: Introductionmentioning
confidence: 99%
“…A polycrystalline diamond plate with a thickness of 530 µm was obtained with use of a microwave plasma-enhanced chemical vapor deposition (MW PECVD) system DF-100 (Russian Academy of Science, Moscow, Russia) using CH 4 /H 2 gas mixture [1,19]. The following conditions have been used: microwave power 3.6 kW, methane content 2%, total flow rate 800 sccm, pressure 87 Torr, substrate temperature 820 • C. Before the deposition, the Si substrate was seeded with suspension of a detonation nanodiamond in ethanol by a treatment in an ultrasonic bath.…”
Section: Methodsmentioning
confidence: 99%
“…Diamond can be considered as a very interesting material for biomedical applications, because of its excellent properties such as the highest known thermal conductivity, biocompatibility, chemical inertness and transparency to light. It is particularly interesting for microfluidic devices manufacturing [1,2]. Currently, many potential applications of diamond are limited by the difficulties in its processing.…”
Section: Introductionmentioning
confidence: 99%
“…49 The cryogenic deep reactive ion etching (RIE), cools the silicon chip to -110°C, before etching the silica away with fluorine radicals generated using a SF 6 /O 2 mixture. When using cryogenic RIE, the etching profile is very sensitive to the specific SF 6 /O 2 ratio.…”
Section: 32d Anisotropic Dry Etching Of Siliconmentioning
confidence: 99%