Diamond film synthesis on Mo in thermal RF plasma

Hernberg, Rolf; Lepistö, Toivo; ̈, T. Ma ̈ntyla; Stenberg, T.; Vattulainen, J.

doi:10.1016/0925-9635(92)90035-m

Cited by 18 publications

(8 citation statements)

References 10 publications

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“…The quick-growing planes decrease in area, while the slow-growing planes increase in area. The results of SEM analysis (Herenberg et al 1992) demonstrated the effects of parameter variations at deposition of films performed in a subatmospheric thermal RF induction plasma reactor. The pressure varied from 600 to 200 mbar, and axial distance of the substrate from the plasma center varied from 15 to 6 cm at fixed substrate temperature (Ts=1000°C).…”

Section: Scanning Electron Microscopymentioning

confidence: 97%

“…There have been many studies on the morphologies of diamond films synthesized by microwave plasma CVD (Kobashi et al 1988), hot-filament CVD (Bonnot et al 1992, Higushi andNoda 1992), DC plasma jet (Boudina et al 1991), in thermal RF plasma (Herenberg et al 1992), arc discharge plasma (Kostadinov et al 1992), combustion flame CVD (Golozar et al 1992), counter-flow liquid injection into an atmospheric pressure plasma jet , and d.c.-glow discharge-enchanced hot filament CVD (Fabisiak et al 1992). The wide range of local deposit conditions that are specific for each of the above methods leads to the quality variations of diamond films.…”

Section: Morphologic Investigations (Secondary Electron Emission Modementioning

confidence: 99%

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Morphologic and cathodoluminescence studies of diamond films by scanning electron microscopy

Saparin

Obyden

1995

Scanning

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Summary: Using recent papers on scanning electron microscopy (SEM) of chemical vapor deposition (CVD) diamond films, two analytical applications of the SEM are discussed: the morphologic investigations (secondary electron emission mode) and the recognition of impurities and defects [cathodoluminescence (CL) mode]. Studies of CVD diamond films by SEM demonstrate that the morphologies of these films are affected by synthesis conditions, especially by substrate temperature, methane concentration, and total pressure in the reactor. CL spectra and images are useful tools for clarifying the relationship between emission centers and different types of defects generated during the process of diamond crystal growth. The paper shows that the investigations of the morphology, crystallinity, local CL emission, as well as the surface distribution of CL spectra on CVD diamond films by SEM led to the correlative information for quality estimation of films in comparison with natural diamond.

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Section: Scanning Electron Microscopymentioning

confidence: 97%

Section: Morphologic Investigations (Secondary Electron Emission Modementioning

confidence: 99%

Morphologic and cathodoluminescence studies of diamond films by scanning electron microscopy

Saparin

Obyden

1995

Scanning

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“…To be observed that the denser and smoother micro- and nano-crystalline diamond is almost containing a significant part of graphitic material where more or less ordered/disordered diamond crystallites are imbedded. However, besides interesting tribological properties, those have generally reduced others (optical, optoelectronic, chemical and mechanical) [114,115,116,117,118,119]. Amorphous diamond and degraded tetrahedral amorphous carbon , ranging from materials with high internal stress such as the amorphous diamond and ta-C:H and others for which the internal stress could be reduced without graphitic degradation [120,121,122,123,124,125,126].…”

Section: Increased Nems Performances With Advanced Carbon Materialsmentioning

confidence: 99%

Section: Increased Nems Performances With Advanced Carbon Materialsmentioning

confidence: 99%

“…Then, they merely correspond to some nanocomposite material containing different adjacent phases and this is often leading to dramatic confusions between materials supposed to belong to the same category, whether being stress annealed or not and presenting important material structures and property differences [27,111,112,113]. Diamond-like carbon produced with non-optimized depositing equipment design and lower optimized depositing process or which is resulting from the thermal annealing of crystalline diamond and from highly stresses harder ta-C has been often considered as an amorphous diamond, although being merely less hard, less homogeneous less smooth, less dense composite material with reduced optical properties and reduced thermal stability (in comparison to the diamond and harder tetrahedral amorphous carbon) [114,115,116,117,118,119,120,121,122,123,124,125].…”

Section: Increased Nems Performances With Advanced Carbon Materialsmentioning

confidence: 99%

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Selective Carbon Material Engineering for Improved MEMS and NEMS

Neuville¹

2019

Micromachines

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The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS design including geometric tolerances and reproducibility of many specific solid-state structures and properties. Among those: Mechanical, adhesion, thermal and chemical stability, electrical and heat conductance, optical, optoelectronic and semiconducting properties, porosity, bulk and surface properties. They can be affected by different kinds of phase transformations and degrading, which greatly depends on the conditions of use and the way the materials have been selected, elaborated, modified and assembled. Distribution of these properties cover several orders of magnitude and depend on the design, actually achieved structure, type and number of defects. It is then essential to be well aware about all these, and to distinguish and characterize all features that are able to affect the results. For this achievement, we point out and discuss the necessity to take into account several recently revisited fundamentals on carbon atomic rearrangement and revised carbon Raman spectroscopy characterizing in addition to several other aspects we will briefly describe. Correctly selected and implemented, these carbon materials can then open new routes for many new and more performing microsystems including improved energy generation, storage and conversion, 2D superconductivity, light switches, light pipes and quantum devices and with new improved sensor and mechanical functions and biomedical applications.

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