Diamond-like carbon deposited by plasma technique as a function of methane flow rate

Viana, G.A.; Motta, E. F.; Costa, M.E.H. Maia da; Freire, F.L.; Marques, F. C.

doi:10.1016/j.diamond.2010.01.043

Cited by 27 publications

(13 citation statements)

References 18 publications

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“…However, for each application, there are different requirements on the �lm properties, for example, the adhesion level achievable and coating cost. erefore, several methods to in�uence the a-C �lms structure, composition, and thus the properties, such as variation of ion energy, plasma treatment, pressure, and the use of different gases were presented [1][2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures

Marton¹,

Vojs²,

Zdravecká

et al. 2013

Journal of Spectroscopy

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To meet various application requirements, it is important to enable an improvement of a-C structure and properties, such as hardness, adhesion, and wear resistance. In this study, we used the Raman spectroscopy to investigate the a-C thin films structure dependence on the different deposition parameters. The effect of nitrogen, argon, and hydrogen gas flow rate was analyzed to determine the influence on the film properties. The change in the gas type, combination, and flow had a significant influence on the D and G bands of the a-C Raman spectra. The addition of N2into the chamber promoted the sp2creation, while with adding hydrogen the layer contained more sp3bonds. The depositions of a-C thin films were carried out in pulsed arc discharge vacuum installation. Micro-Raman measurements of the deposited materials were performed using an ISA Dilor-Jobin Yvon-Spex Labram confocal system with 632.8 nm radiation from a He-Ne laser using a back-scattering geometry.

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Section: Introductionmentioning

confidence: 99%

Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures

Marton¹,

Vojs²,

Zdravecká

et al. 2013

Journal of Spectroscopy

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“…Fig. 2 shows the Raman spectrum for the a-C:H film deposited at − 700 V. While the D band, which appears approximately at 1360 cm −1 , is related to closed sp 2 structures (aromatics), the G band, which appears approximately at 1550 cm −1 , is associated either with closed or open (olefenics) sp 2 structures [29,30]. The integrated intensity ratio of the D and G bands (I D /I G ) gives qualitative information about the number and the order of the aromatic structures [31][32][33].…”

Section: Resultsmentioning

confidence: 98%

Deposition of amorphous hydrogenated carbon films on steel surfaces through the enhanced asymmetrical modified bipolar pulsed-DC PECVD method

Capote

Corat

Trava-Airoldi

2014

Surface and Coatings Technology

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“…Os revestimentos a base de carbono amorfo do tipo diamond-like carbon (DLC) vem sendo uma alternativa em diversas aplicações tecnológicas, como por exemplo revestimento duro para ferramentas, peças automotivas, discos rígidos para computador e sistemas micro/nano-eletro-mecânicos (M/NEMS). Suas aplicações estão associadas principalmente com as propriedades de alta dureza, grande inércia química e lubrificação sólida [4]. Os DLCs não consistem somente em carbono amorfo (a-C) mas também de ligas hidrogenadas (a-C:H), como mostra o diagrama ternário da figura 1, onde diferentes famílias de DLC são caracterizadas pelos percentuais de ligações sp², sp³ e quantidade de hidrogênio [5].…”

Section: Introductionunclassified

Genese E Estabilidade De Tribocamadas Em Lubrificação Solida Caso Do Par Dlc–aço Inoxidável

Salvaro¹,

Silvério²,

Binder³

et al. 2018

ABM Proceedings

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ResumoA morfologia, dimensões e composição química de tribocamadas são fortemente dependentes das pressões e temperaturas existentes no contato e oriundas das reações das superfícies entre si, com a atmosfera, com os lubrificantes e contaminantes presentes no contato. No presente artigo foi analisada a formação de tribocamadas em pares DLCaço inoxidável testados por 180, 500, 1000 e 2500 horas em atmosfera de gás refrigerante R134a sem a presença de óleo lubrificante. A caracterização foi realizada por microscopia eletrônica de varredura espectroscopia de energia dispersiva (MEV-EDS) (morfologia e composição química) e interferometria ótica de luz branca (dimensões). Nas análises por MEV-EDS foram identificadas tribocamadas que se apresentaram mais pronunciadas nas superfícies do aço inoxidável sendo as mesmas oriundas de transferências mútuas entre os pares tribológicos bem como oxidação. A espessura das tribocamadas, por sua vez variou de 100 a 500 nm. Os resultados revelam que as tribocamadas são quimicamente estáveis e que suas espessuras não variam significativamente após mil horas de ensaio. Palavras-chave: Tribologia, tribocamada, Carbono tipo-diamante (DLC). GENESIS AND STABILITY OF TRIBOLAYERS IN SOLID LUBRICATION: CASE OF PAIR DLC-STAINLESS STEEL AbstractThe morphology, dimensions and chemical composition of tribolayers strongly depend on the pressures and temperatures acting on the contact. They are formed by reactions between the surfaces in contact with each other as well as with the atmosphere, lubricants and possible contaminants. In this paper the influence of test time (180, 500, 1000 and 2500 h) into the formation and characteristics of tribolayers in pairs DLC-stainless steel tested under refrigerant gas R134a atmosphere without presence of lubricating oil was analyzed. The characterization was performed using scanning electron microscopy, energy dispersive spectroscopy (SEM-EDS) (morphology and chemical composition) and white light interferometry (dimensions). The tribolayers thicknesses ranged from 100 to 500 nm and they were composed by elements originated from mutual transfers between the tribological pairs as well as oxides, being more pronounced on the stainless steel surface. The results show that the tribolayers are chemically stable (maintained the same composition over time) and the thickness remained stable after a thousand hours of testing.

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Diamond-like carbon deposited by plasma technique as a function of methane flow rate

Cited by 27 publications

References 18 publications

Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures

Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures

Deposition of amorphous hydrogenated carbon films on steel surfaces through the enhanced asymmetrical modified bipolar pulsed-DC PECVD method

Genese E Estabilidade De Tribocamadas Em Lubrificação Solida Caso Do Par Dlc–aço Inoxidável

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