Diamond-like-carbon films produced by magnetically guided pulsed laser deposition

Minami, H.; Manage, Dammika P.; Tsui, Ying Y.; Fedosejevs, R.; Malac, Marek; Egerton, R.F.

doi:10.1007/s003390101009

Cited by 14 publications

(7 citation statements)

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“…With some optimized parameters, which include the laser wavelength, laser fluence, and high vacuum, the amorphous diamond-like carbon (DLC) thin film is obtained [1][2][3][4][5][6][7]. This deposition arrangement is generally known as the on-axis, or the normal-plane pulsed laser deposition (n-PLD), which usually promise a relatively smooth and particulate-free thin film.…”

Section: Introductionmentioning

confidence: 99%

Target-plane deposition of diamond-like carbon in pulsed laser ablation of graphite

Yap¹,

Tou²

2007

Applied Surface Science

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Section: Introductionmentioning

confidence: 99%

Target-plane deposition of diamond-like carbon in pulsed laser ablation of graphite

Yap¹,

Tou²

2007

Applied Surface Science

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“…8 In PLD, it is a serious disadvantageous that many micron sized particles deposited together with ablated species and many methods have been tried to develop droplet free thin films. 9 It is ideal to have uniform particle distribution in laser-ablation sample introduction system for ICP-MS for avoiding elemental fractionation. 10 So understanding the particle emission and its generation during laser ablation is significantly important for LPP applications.…”

Section: Introductionmentioning

confidence: 99%

Late-time particle emission from laser-produced graphite plasma

Harilal¹,

Hassanein²,

Polek³

2011

Journal of Applied Physics

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We report a late-time "fireworks-like" particle emission from laser-produced graphite plasma during its evolution. Plasmas were produced using graphite targets excited with 1064 nm Nd: yttrium aluminum garnet (YAG) laser in vacuum. The time evolution of graphite plasma was investigated using fast gated imaging and visible emission spectroscopy. The emission dynamics of plasma is rapidly changing with time and the delayed firework-like emission from the graphite target followed a black-body curve. Our studies indicated that such firework-like emission is strongly depended on target material properties and explained due to material spallation caused by overheating the trapped gases through thermal diffusion along the layer structures of graphite. V C 2011 American Institute of Physics.

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“…Minami et al developed a PLD with a curved solenoid coil. 15) They deposited carbon thin film with and without an applied magnetic field of 0.3 T. They found that the use of a magnetic guide field reduces inclusion of droplets in the film. Additionally, they found that the sp 3 fraction in the carbon thin film increased when using a magnetic guide field, which means that a better-quality diamond-like-carbon film is obtained through deposition using a pure ion component in the plume.…”

Section: Purpose Of This Reviewmentioning

confidence: 99%

Progress and impact of magnetic field application during pulsed laser deposition (PLD) on ceramic thin films

Wakiya

Kawaguchi

Sakamoto

et al. 2017

J. Ceram. Soc. Japan

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When a focused laser beam is irradiated onto a target, electrons and cations are emitted from the target to form a plume (plasma). This phenomenon is referred to as laser ablation (LA). The thin film deposition method using laser ablation is referred to as pulsed laser deposition (PLD). Recombination of electrons and cations usually occurs in the plume before they arrive at a substrate to form a thin film. However, previous reports show that applying a magnetic field to the plume suppresses recombination and enhances electron-impact excitation. The flux of electrons and cations can therefore be controlled by an external magnetic field during PLD. Charged cations can separate from neutral particles or heavy clusters such as droplets. This principle has been used to obtain droplet-free thin films. Applying a magnetic field to the plume also causes ohmic heating and suppression of adiabatic expansion. The electron temperature in a plume with magnetic field application is therefore higher than that in a plume without magnetic field application. This principle has been used to lower crystallization temperatures, improve crystallinity, and enhance thin film properties. Because application of a magnetic field suppresses recombination and enhances electron-impact excitation, several cations exist in the plume. These then rush to the substrates. This principle produces changes the growth mode, which in turn brings about changes in the thin film morphology. Furthermore, this principle leads to phase separation control. The impingement of cations reportedly brings about lowering of the activation energy for diffusion, which leads to phase separation by spinodal decomposition. A thin film with a spontaneous superlattice structure forms when compositional wave propagation occurs in one direction, but when a cross-linked microstructure is obtained the compositional wave direction of propagation is random. This review presents the influence of application of a magnetic field during deposition.©2017 The Ceramic Society of Japan. All rights reserved.Key-words : PLD, Effect of magnetic field, Magnetic field-induced phase separation [Received July 29, 2017; Accepted September 23, 2017] 1. General theory of the effects of application of a magnetic field to the plume When a focused laser beam is irradiated onto the surface of a solid (or liquid), the substances on the surface evolve explosively to form a plume (plasma). Electrons and cations as well as neutral atoms or molecules and their clusters are included in the plume (plasma). This phenomenon is referred to as laser ablation (LA). Thin film deposition by LA is generally referred to as pulsed laser deposition (PLD), by which the vapor phase in the plume is deposited onto a substrate to form a thin film.1) The configuration of PLD is simple compared to those of physical vapor phase deposition methods such as sputtering and molecular beam deposition (MBE). It is therefore easy to install some devices for plume stimulation. In actuality, several experiments on applying an elect...

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Diamond-like-carbon films produced by magnetically guided pulsed laser deposition

Cited by 14 publications

References 0 publications

Target-plane deposition of diamond-like carbon in pulsed laser ablation of graphite

Target-plane deposition of diamond-like carbon in pulsed laser ablation of graphite

Late-time particle emission from laser-produced graphite plasma

Progress and impact of magnetic field application during pulsed laser deposition (PLD) on ceramic thin films

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