Diamond-like carbon films with extremely low stress

Kumar, Sushil; Sarangi, D.; Dixit, P. N.; Panwar, O. S.; Bhattacharyya, R.

doi:10.1016/s0040-6090(98)01500-4

Cited by 36 publications

(24 citation statements)

References 30 publications

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“…These stresses are known to vary as a function of the bias voltage [5,6], power density [7,8], and gas precursor [5]. Modern techniques allow for the deposition of multi-layer or gradient coatings, as well as doping or alloying of a DLC coating, and these are used to reduce internal stresses or to achieve some extra functionality.…”

Section: Introductionmentioning

confidence: 99%

The friction of diamond-like carbon coatings in a water environment

et al. 2013

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Diamond-like carbon (DLC) coatings are known to provide beneficial mechanical and tribological properties in harsh environments. Their combination of high wear resistance and low friction has led to their extensive use in any number of industries. The tribological performance of a DLC coating is varied however, and the frictional response is known to be strongly dependent on the surrounding environment, as well as the material composition and bonding structure of the DLC coating. This paper presents an up-to-date review on the friction of DLC coatings in a water environment, with a special focus on transfer layer formation and tribochemistry.

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Section: Introductionmentioning

confidence: 99%

The friction of diamond-like carbon coatings in a water environment

et al. 2013

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“…In present study, it has been observed that the self relax process produces a systematic wave pattern on the surface, which depends on the RF power. High value of stress up to 7 GPa in DLC films has been reported by many authors [8][9][10]. High value of stress restricts the thickness of the DLC films and is the main cause of peeling of the films from substrate, which also restricts the DLC films for many applications.…”

Section: Resultsmentioning

confidence: 95%

“…The characteristic features of most of the processes for growing dense carbon films are the energetic species usually in the range of 50 to 500 eV that hit the surface of the growing films [3]. DLC has high hardness, spanning the range from 10 to 30 GPa, associated with high intrinsic compressive stress in the range from 0.5 to 7 GPa [8,9,20]. The high internal stress limits the DLC films for various applications.…”

Section: Related Workmentioning

confidence: 99%

“…DLC is not a single material, but a broad class of amorphous carbon based materials, consists not only of the amorphous carbon but also of hydrogenated alloys [3]. DLC films have two disadvantages: (i) low deposition rate and (ii) high internal stress [8][9][10]. Unlike diamond, it cannot be obtained as thick monolithic shapes, at least with the present technology.…”

Section: Introductionmentioning

confidence: 99%

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Correlation of Mechanical Properties with Surface Morphology of Diamond-Like Carbon Films Deposited By Plasma Enhanced Chemical Vapour Deposition Technique

Mahant¹,

Sharma²,

Sharma³

et al. 2014

IJIRSET

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Diamond like carbon (DLC) films are deposited on glass substrates by using radio frequency plasma enhanced chemical vapour deposition technique with the variation of RF power. DLC films are deposited by using argon and acetylene plasma, at pressure 5×10-2 mbar for 60 minutes. Various properties like surface morphology, hydrophobicity, nanohardness, and structural properties are studied by using atomic force microscope, contact angle measurement setup, nano-hardness tester and Raman spectrometer, respectively. Systematic variation in surface morphology with RF power has been observed. It has been observed that the morphology of the films is correlated with the hardness, sp3 content, roughness, and contact angle. Observed results have been explained using Raman spectra.

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“…For Electron Synchrotron Resonance ( ECR) deposition & etching 2.45 GHz is the allowed frequency range .Inductively Coupled Plasma(ICP) reactors (electron densities in 10 11 -10 13 cm -3 ) with the BOSCH licensed process is being increasingly used for MEMS fabrication .Free standing Diamond for Gyratrons, Gem quality Diamond, Nano diamond, CNT, Graphene and DLC ,all these carbon forms are now commercially produced by innovation in plasma processing .Plasma polymerization is again an area which is seeing much development in textiles as well in interface design of Biosensors. Authors of this paper were once coworkers at the National Physical Laboratory, New Delhi in its erstwhile " Plasma Processed Material group" and had many opportunities to work at the then emerging interfaces of Plasma Science and technologies [1][2][3][4][5][6]. Drawing from their experiences they present in this paper an experiential account of the following technological problems they set out to understand and find solutions, 1.…”

Section: Introductionmentioning

confidence: 99%