Diamond/ZnO/LiNbO<sub>3</sub> structure for packageless acoustic wave sensors

Floer, Cécile; Moutaouekkil, Mohammed; Bartoli, Florian; Mishra, Harshad; Murtry, Stefan Mc; Hage-Ali, Sami; Elmazria, O.; Dekkar, Damia; Baudrillart, Benoît; Bénédic, F.; Zhgoon, Sergei; Talbi, Abdelkrim; Matar, Olivier Bou; Aubert, Thierry

doi:10.1109/icsens.2017.8234393

Cited by 2 publications

(2 citation statements)

References 11 publications

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“…In this configuration, the inter‐digital transducers (IDTs) are deposited on the LiNbO 3 substrate; AlN and LiNbO 3 have a high acoustic velocity compared to ZnO; and LiNbO 3 is characterized by a high electromechanical coupling coefficient and weak acoustic wave propagation losses . Recently, it was shown that the use of a sputtered AlN film of 6 μm thickness causes acoustic losses during propagation, while theoretical calculations pointed out that using only 2.5 μm of diamond films would be sufficient to confine the wave and to reduce the propagation losses . Moreover, the wave confinement should be improved with the diamond layer.…”

Section: Introductionmentioning

confidence: 99%

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Dekkar

Bénédic

Floer

et al. 2018

Physica Status Solidi (a)

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In this article, the nanocrystalline diamond (NCD) film low temperature deposition process on ZnO/Si, ZnO/LiNbO3, and ZnO/IDTs/LiNbO3 substrates is investigated aiming at obtaining layered structures suitable for waveguiding layer acoustic wave (WLAW) devices. The NCD synthesis is performed at 250 °C by using a distributed antenna array (DAA) microwave system operating in H2/CH4/CO2 gas mixture at low pressure (<1 mbar). Since the ZnO layer is etched during the NCD growth process, the deposition of a thin AlN layer of few hundred nanometers in thickness on the considered substrates is performed and is shown to be effective as a protective layer. Diamond growth on AlN‐coated ZnO/Si substrates emphasizes the ability of the DAA reactor to synthesize NCD films with properties similar to those obtained on silicon substrates. Besides adherent NCD films up to 300 nm thickness are synthesized on AlN‐coated ZnO/LiNbO3 substrates but stress in the layered structure appears during the plasma process. Finally, the feasibility of a NCD/AlN/ZnO/IDTs/LiNbO3 layered structure, suitable for WLAW devices, is successfully demonstrated, even if the NCD film adherence must be further improved on the inter‐digital transducers (IDTs) finger zone.

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Section: Introductionmentioning

confidence: 99%

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Dekkar

Bénédic

Floer

et al. 2018

Physica Status Solidi (a)

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“…Diamond, which is harder than AlN may then be considered for the upper layer [21]. Comparison between the two structures AlN/ZnO/LiNbO3 and Diamond/ZnO/LiNbO3 are in progress [22]. In order to obtain low-profile sensors, the manufacturing of SAW devices on thinned substrates is also interesting.…”

Section: Discussionmentioning

confidence: 99%

AlN/ZnO/LiNbO₃Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

Floer

Hage-Ali

Zhgoon

et al. 2018

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Surface acoustic wave sensors find their application in a growing number of fields. This interest stems in particular from their passive nature and the possibility of remote interrogation. Still, the sensor package, due to its size, remains an obstacle for some applications. In this regard, packageless solutions are very promising. This paper describes the potential of the AlN/ZnO/LiNbO structure for packageless acoustic wave sensors. This structure, based on the waveguided acoustic wave principle, is studied numerically and experimentally. According to the COMSOL simulations, a wave, whose particle displacement is similar to a Rayleigh wave, is confined within the structure when the AlN film is thick enough. This result is confirmed by comprehensive experimental tests, thus proving the potential of this structure for packageless applications, notably temperature sensing.

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Diamond/ZnO/LiNbO₃ structure for packageless acoustic wave sensors

Cited by 2 publications

References 11 publications

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

AlN/ZnO/LiNbO₃Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

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Diamond/ZnO/LiNbO3 structure for packageless acoustic wave sensors

Cited by 2 publications

References 11 publications

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

AlN/ZnO/LiNbO3Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

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Diamond/ZnO/LiNbO₃ structure for packageless acoustic wave sensors

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

AlN/ZnO/LiNbO₃Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications