Diaphragm design guidelines and an optical pressure sensor based on MEMS technique

Wang, Xiaodong; Li, Baoqing; Russo, Onofrio; Roman, Harry T.; Chin, Ken K.; Farmer, K.R.

doi:10.1016/j.mejo.2005.06.015

Cited by 72 publications

(33 citation statements)

References 8 publications

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“…For a dynamic measurement, resonance frequency of the micro-diaphragm need to be studied [17]. Therefore it is important to characterize the relationships between the micro diaphragm dimension, sensitivity and resonance frequency to design the micro-diaphragm.…”

Section: Methodsmentioning

confidence: 99%

Micro-diaphragm performance analysis for polyimide diaphragm

Hasikin‬

Soin

Ibrahim

2010

2010 IEEE International Conference on Semiconductor Electronics (ICSE2010)

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This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90µm and thickness of 4µm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency.

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Section: Methodsmentioning

confidence: 99%

Micro-diaphragm performance analysis for polyimide diaphragm

Hasikin‬

Soin

Ibrahim

2010

2010 IEEE International Conference on Semiconductor Electronics (ICSE2010)

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“…In this design, the loaddeflection relationship of a circular diaphragm is applied [15]: (2) III. RESULTS & DISCUSSIONS However, when the size of the diaphragm is increased, the deflection and stress is also increased as shown in Fig.…”

Section: Methodsmentioning

confidence: 99%

“…This diaphragm must be capable to deflect linearly [14]. In order to ensure the diaphragm operates in a linear range, the natural frequency of the diaphragm should be at least 2.5 times larger than the applied frequency [15]. Since the sensor is designed for…”

Section: Methodsmentioning

confidence: 99%

Modeling of a micro-diaphragm biosensor for human artery pulse wave detection

Hasikin‬

Ibrahim

Soin

2008

2008 IEEE International Conference on Semiconductor Electronics

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The analysis of the behavior of the micro-diaphragm biosensor for human artery pulse wave detection has been presented in this paper. This includes the study of the effect of the diaphragm structural parameters on the static and dynamic performances such as sensitivity and natural frequency. It can be concluded that the modeled micro-diaphragm with a radius of 175J1m and thickness of 4J1m respectively has satisfied the maximum allowable deflection and operates in optimum frequency response.

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“…The interferometric spectrum is observed from the interference of R 1 and R 2 . Reflectance R that has resulted from R 1 and R 2 , can be approximated for low R 1 , R 2 ≪ 1 [22]:…”

Section: A Principle Of Fp Operationmentioning

confidence: 99%

Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber

et al. 2013

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In this paper, we present the fabrication and packaging of a cantilever-based airflow sensor integrated with optical fiber. The sensor consists of a micro Fabry-Perot (FP) cavity including a fiber and a micro cantilever that is fabricated using the photolithography method. Airflow causes a small deflection of the micro cantilever and changes the cavity length of the FP, which makes the fringe shift. The pressure distribution and velocity streamlines across the cantilever resulted from the airflow in the channel have been simulated by the finite element method. The experimental results demonstrate that the sensor has a linear sensitivity of 190 [fringe shift (pm)] per (l / min) and a minimum detectable airflow change of 0.05 l∕min.

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Diaphragm design guidelines and an optical pressure sensor based on MEMS technique

Cited by 72 publications

References 8 publications

Micro-diaphragm performance analysis for polyimide diaphragm

Micro-diaphragm performance analysis for polyimide diaphragm

Modeling of a micro-diaphragm biosensor for human artery pulse wave detection

Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber

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