The overall goals of this program are to develop III-N deep-UV injection lasers operating at <250nm at 300K with CW output power greater than 5mW. The Georgia Tech program is divided into four primary tasks: (1) III-N Materials Growth and Evaluation; (2) Detailed III-N Materials Characterization; (3) III-N UV laser design and simulation; and (4) III-N UV laser processing, testing, and characterization. The recent efforts by the Georgia Tech/ASU team are summarized below. This report will focus on the recent work in the past six months of the program.
Summary of Overall Program Major Accomplishments:1. We have developed MOCVD growth technologies for III-N deep-UV lasers on two different growth systems: the "standard" Thomas-Swan 6x2 Close-Coupled Showerhead MOCVD reactor using AlGaN-AlN growth conditions at ~1150C, and one new high-temperature AIXTRON 3x2 Close-Coupled Showerhead MOCVD system operating at up to ~1300C, (which was purchased partially with funds from this program), to allow us to explore "higher temperature" growth regimes. 2. We have exploited advanced high-resolution materials growth technologies, e.g., high-angle annular dark-field (HAADF) imaging, Rutherford Back Scattering, high-resolution TEM, and variable-temperature cathodoluminescence, to characterize the III-N wide-bandgap materials. 3. We have developed the most complete and advanced III-N device simulation tool and have utilized it to optimize the optical and electrical performance of deep-UV laser diodes at ~250nm. 4. We have developed and exercised the required III-N UV laser device processing, wafer thinning, facet cleaving, facet coating, and optical characterization techniques and exploited these processes to demonstrate optically pumped pulsed UV lasers at <250nm with thresholds as low as ~297 kW/cm 2 for lasers at =245.3 nm without facet coatings. 5. Additional studies of optically pumped lasers with one facet coated has shown 300K lasing at
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NOV 20132. REPORT TYPE We have developed MOCVD growth technologies for III-N deep-UV lasers on two different growth systems: the ?standard? Thomas-Swan 6x2 Close-Coupled Showerhead MOCVD reactor using AlGaN-AlN growth conditions at ~1150C, ...