2014
DOI: 10.1063/1.4891521
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Dielectric function in the NIR-VUV spectral range of (InxGa1−x)2O3 thin films

Abstract: Articles you may be interested inTemperature dependence of the dielectric function in the spectral range (0.5-8.5) eV of an In2O3 thin film

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Cited by 28 publications
(17 citation statements)
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References 33 publications
(74 reference statements)
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“…Please note that, similar to our investigations on (In x Ga 1Àx ) 2 O 3 thin films reported earlier, 12 we have determined the effective isotropic dielectric function 37 of this ternary alloy of optically biaxial and uniaxial binary materials. This was necessary because we have no access to the individual dielectric tensor components due to rotation domains and twinning of the crystallites and the occurrence of the different crystal structure phases in the thin films.…”
Section: B Spectroscopic Ellipsometrymentioning
confidence: 62%
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“…Please note that, similar to our investigations on (In x Ga 1Àx ) 2 O 3 thin films reported earlier, 12 we have determined the effective isotropic dielectric function 37 of this ternary alloy of optically biaxial and uniaxial binary materials. This was necessary because we have no access to the individual dielectric tensor components due to rotation domains and twinning of the crystallites and the occurrence of the different crystal structure phases in the thin films.…”
Section: B Spectroscopic Ellipsometrymentioning
confidence: 62%
“…From that, we conclude that the crystal quality in general is not strongly affected by Al incorporation, differently to In. 12 This may be related to the covalent radius of Al being similar to that of Ga, resulting in only a small variation of the lattice parameters with the composition, particularly as compared to (In x Ga 1Àx ) 2 O 3 . 32,40 Much more pronounced than in the (In x Ga 1Àx ) 2 O 3 alloy system, the overall spectral weight of the electronic band-band transitions decreases considerably with the increase in Al incorporation in the spectral range investigated here.…”
Section: B Dielectric Function and Absorption Coefficientmentioning
confidence: 98%
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“…The dielectric function (DF), trueϵ˜=ϵ1+italiciϵ2, of the thin films was determined by means of spectroscopic ellipsometry in a wide spectral range from 0.5 to 8.5 eV at room temperature using a J. A. Woollam Co. Inc. VUV‐VASE spectroscopic ellipsometer at angles of incidence of 60 and 70 . For the isotropic case, the measured quantities Ψ and Δ are defined by the ratio ρ=rp/rs=tanΨexpfalse(iΔfalse) of the complex reflection coefficients rp and rs.…”
Section: Methodsmentioning
confidence: 99%