Copper Interconnect Technology 2009
DOI: 10.1007/978-1-4419-0076-0_2
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Dielectric Materials

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Cited by 13 publications
(9 citation statements)
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“…Often, κ is reported for static fields, though most electronics actually operate in the high-frequency regime (>GHz). 27 While high-κ dielectrics help to prevent significant leakage current when scaling down FETs, they tend to also have lower switching speeds than low-κ materials. Additionally, since ac power dissipation is proportional to capacitance, low-κ dielectrics may be desired to reduce power consumption.…”
Section: Biodegradable Polymeric Components For Organic Electronicsmentioning
confidence: 99%
See 2 more Smart Citations
“…Often, κ is reported for static fields, though most electronics actually operate in the high-frequency regime (>GHz). 27 While high-κ dielectrics help to prevent significant leakage current when scaling down FETs, they tend to also have lower switching speeds than low-κ materials. Additionally, since ac power dissipation is proportional to capacitance, low-κ dielectrics may be desired to reduce power consumption.…”
Section: Biodegradable Polymeric Components For Organic Electronicsmentioning
confidence: 99%
“…Additionally, since ac power dissipation is proportional to capacitance, low-κ dielectrics may be desired to reduce power consumption. 27 There are a wide variety of biodegradable materials and engineering methods available to prepare dielectric materials with tailored properties for particular applications.…”
Section: Biodegradable Polymeric Components For Organic Electronicsmentioning
confidence: 99%
See 1 more Smart Citation
“…3J). A low k dielectric material (e.g., Aromatic thermosets, Teflon AF [19]) can be used to make sure interlayer coupling noises are less. For planarization, standard techniques such as chemical mechanical polishing can be used.…”
Section: N 3 Asic Fabric Overviewmentioning
confidence: 99%
“…The thermal stability of the high-k dielectric material is also of importance, thus, a dielectric material should show good thermal stability, at least at the processing temperatures of the device, and have a low coefficient of thermal expansion. 4,8,9 In order to carry out diffusion studies, we use tin (Sn), a highly mobile metallic probe atom, to test if Sc 2 O 3 layers of various thicknesses act as a diffusion barrier. Although Sn is not relevant for high-k dielectric applications we used it due to the fact that Sn has the advantage of forming a volatile hydride, which allows it to be removed from surfaces with hydrogen reactive species.…”
Section: Introductionmentioning
confidence: 99%