1969
DOI: 10.1007/bf00814845
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Dielectric properties of Sb2O3 films

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Cited by 2 publications
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“…When normalizing V B by the nanoflake thickness, breakdown strength (E B ) could be The experimentally confirmed E B is in the range of 1.4∼2.5 MV/cm, comparable with those of the semi-amorphous α-Sb 2 O 3 polycrystalline films. 10,11 Distinctively, the nanoflake E B is independent of the thickness, probably because of the defectfree virtue. Above all, the E B > 1 MV/cm qualifies α-Sb 2 O 3 as an interlayer dielectric.…”
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confidence: 99%
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“…When normalizing V B by the nanoflake thickness, breakdown strength (E B ) could be The experimentally confirmed E B is in the range of 1.4∼2.5 MV/cm, comparable with those of the semi-amorphous α-Sb 2 O 3 polycrystalline films. 10,11 Distinctively, the nanoflake E B is independent of the thickness, probably because of the defectfree virtue. Above all, the E B > 1 MV/cm qualifies α-Sb 2 O 3 as an interlayer dielectric.…”
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confidence: 99%
“…It is thermally stable up to ∼550 °C and has a wide application such as flame retardant. In literature, the k values of the polycrystalline α-Sb 2 O 3 films vary widely from 5 to 13. Such a polycrystalline film is a matrix of the glass phase Sb 2 O 3 , in which α-Sb 2 O 3 nanograins are embedded. , The inconsistency in the amorphous degree of the glass phase is a reason for the obvious k disagreement. Although these studies were carried out nearly a half-century ago, the α-Sb 2 O 3 dielectric nature remains unknown, probably because of a scarcity of single crystalline sample.…”
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