1997
DOI: 10.1080/00150199708228374
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Dielectric, pyroelectric and structural properties of LiTaO3thin films grown on silicon by a modified molecular beam epitaxy

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Cited by 9 publications
(8 citation statements)
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“…Tantalum oxide was of interest in this work because lithium tantalate, LiTaO 3 , is not only a possible lithium-ion conducting material when in a proper form , but also a well-known optical, ferroelectric, and piezoelectric material , with potential uses in, for example, optical waveguides . Ta 2 O 5 films were deposited using tantalum ethoxide and water and were amorphous as-deposited .…”
Section: Resultsmentioning
confidence: 99%
“…Tantalum oxide was of interest in this work because lithium tantalate, LiTaO 3 , is not only a possible lithium-ion conducting material when in a proper form , but also a well-known optical, ferroelectric, and piezoelectric material , with potential uses in, for example, optical waveguides . Ta 2 O 5 films were deposited using tantalum ethoxide and water and were amorphous as-deposited .…”
Section: Resultsmentioning
confidence: 99%
“…Thus, the films with Li 2 O concentration lower than 50 mol% are nonstoichiometric although they consist of a single phase. Different direct methods such as the secondary ion mass spectroscopy, X‐ray photoelectron spectroscopy (XPS), ICP‐AES, and Rutherford backscattering spectrometry (RBS), were used to estimate Li concentration within the grown films. The Li concentration cannot be estimated directly from RBS data; thus, the Nb/O ratio was studied, which makes the analysis highly inaccurate .…”
Section: Growth Of Linbo3 and Litao3 Films By Chemical And Physical Mmentioning
confidence: 99%
“…The combination of RBS with nuclear microanalysis of Li and O contents made it possible to determine the absolute film composition with an accuracy of 3% for Nb and O, and of 10% for Li, and the relative element ratios with a precision of 1% . The accuracy of XPS in Li concentration is within 20% . About 1%–2% error in absolute Li concentration can be attained by ICP‐AES .…”
Section: Growth Of Linbo3 and Litao3 Films By Chemical And Physical Mmentioning
confidence: 99%
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